用于功率开关应用的GaN HEMT, MIS-HEMT和p栅极HEMT的可靠性和失效物理:由于深层效应和时间相关击穿现象的寄生效应和退化

E. Zanoni, M. Meneghini, G. Meneghesso, D. Bisi, I. Rossetto, A. Stocco
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引用次数: 28

摘要

综述了功率氮化镓(GaN)高电子迁移率晶体管(HEMTs)、金属绝缘体半导体HEMTs (MISHEMTs)和p栅极HEMTs的可靠性研究进展。当受到高电场值时,栅极和绝缘介质以及有缺陷的外延层容易发生时间依赖的击穿机制,电荷捕获现象和产生深能级或界面态。这可能引起退化效应,如阈值电压移位和栅极-漏极或漏极-源极灾难性击穿。对于大多数机制,失效时间遵循威布尔分布,寿命外推可以使用阿累尼乌斯定律和常见的电场加速模型。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability and failure physics of GaN HEMT, MIS-HEMT and p-gate HEMTs for power switching applications: Parasitic effects and degradation due to deep level effects and time-dependent breakdown phenomena
Recent studies on the reliability of power Gallium Nitride (GaN) High Electron Mobility Transistors (HEMTs), Metal Insulator Semiconductor-HEMTs (MISHEMTs) and p-gate HEMTs are reviewed. When submitted to high electric field values, gate and insulating dielectrics as well as defective epitaxial layers are prone to time dependent breakdown mechanisms, charge trapping phenomena and generation of deep levels or interface states. This may originate degradation effects such as threshold voltage shifts and gate-drain or drain-source catastrophic breakdown. For most mechanisms, time to failure follows a Weibull distribution and lifetime extrapolation is possible using Arrhenius law and common electric field acceleration models.
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