Jiangjiang Gu, Xinwei Wang, J. Shao, A. Neal, M. Manfra, Roy G. Gordon, P. D. Ye
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We fabricated for the first time vertically and laterally integrated III-V 4D transistors. III-V gate-all-around (GAA) nanowire MOSFETs with 3×4 arrays show high drive current of 1.35mA/μm and high transconductance of 0.85mS/μm. The vertical stacking of the III-V nanowires have provided an elegant solution to the drivability bottleneck of nanowire devices and is promising for future low-power logic and RF application.
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