用于MEMS的热解聚合物的半导体特性

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI:10.1109/SENSOR.2005.1496409

Satoshi Konishi, H. Nagae, T. Sagawa, K. Naka, K. Yoshioka

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引用次数: 7

摘要

本文讨论了一种热解聚合物，它是由聚合物热解得到的一种碳材料。热解过程在没有O/ sub2 /的情况下通过热处理进行。MEMS中使用的各种聚合物材料是热解聚合物的潜在前体。聚合物的微加工使各种聚合物MEMS结构成为可能。聚合物MEMS结构可以转化为“热解聚合物MEMS”，用于各种应用。这项工作的重点是来自MEMS中流行的聚合物材料的热解聚合物的半导体性。霍尔效应的测量提供了有关热解聚合物的半导体性的信息。设计并演示了二极管作为半导体热解聚合物应用的第一步。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Semiconductivity of pyrolyzed polymer for MEMS application

The paper deals with a pyrolyzed polymer as a kind of carbon material obtained by the pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O/sub 2/. Various polymer materials utilized in MEMS are potential precursors of pyrolyzed polymers. Micromachining of polymers has allowed various polymer MEMS structures. Polymer MEMS structures can be transformed into "pyrolyzed polymer MEMS" for various applications. This work focuses on the semiconductivity of a pyrolyzed polymer derived from popular polymer materials in MEMS. A measurement of the Hall effect provides information on the semiconductivity of pyrolyzed polymer. A diode is designed and demonstrated as the first step in the application of the semiconductive pyrolyzed polymer.

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来源期刊

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

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