基于平衡气相组成的宽带II-VI半导体化学计量偏差测定

S. Kobeleva
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引用次数: 1

摘要

提出了一种测定镉和锌硫族化合物化学计量偏差的方法,该方法基于固体化合物在有限体积内蒸发过程中组分分压比的温度依赖性。新方法不同于在大量蒸发过程中收集过量成分的方法。该方法包括测量材料加热到800k以上时气相组分的分压,求解一组物质平衡方程和电中性方程,计算室温下初始化合物的化学计量偏差。用准化学反应的方法计算了本征点缺陷浓度。这组物质平衡方程中的自变量是所寻求的化学计量偏差、金属的分压和自由电子的浓度。我们表明,在加热和蒸发过程中,决定该方法对化学计量偏差敏感性的物质平衡方程参数,即气相和固相的体积比,如果该参数不超过50,则可以认为是恒定的。如果分压是基于蒸汽的光密度测量的,那么该方法的灵敏度可以增加到不低于10 - 6% at.%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Determination of stoichiometry deviation in wide-band II–VI semiconductors on the basis of equilibrium vapor phase composition
A method has been suggested for determining stoichiometry deviation in cadmium and zinc chalcogenides based on the temperature dependence of the ratio of components partial pressures during evaporation of solid compounds in a limited volume. The new method differs from methods implying the collection of excessive component during evaporation in large volumes. The method includes measuring the partial pressures of vapor phase components during material heating to above 800 K, solving a set of material balance equations and the electric neutrality equation, and calculating the stoichiometry deviation in the initial compound at room temperature. Intrinsic point defect concentrations are calculated using the method of quasichemical reactions. The independent variables in the set of material balance equations are the sought stoichiometry deviation, the partial pressure of the metal and the concentration of free electrons. We show that the parameter of the material balance equation which determines the method’s sensitivity to stoichiometry deviation, i.e., the volume ratio of vapor and solid phases, can be considered constant during heating and evaporation if this parameter does not exceed 50. If the partial pressure is measured based on the optical density of the vapors, then the sensitivity of the method can be increased to not worse than 10–6 at.%.
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