铱覆盖型探针的开发;铱覆盖型探针的开发;Development of an Iridium-coated Probe

Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI:10.3131/JVSJ2.60.92

Koichi Miyazono, T. Yorita, Masayuki Yamauchi, Yoshihiro Masui, H. Toyota, Masaki Koike, Takeshi Tanaka

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摘要

发展Iridium-coated探针Koichi MIYAZONO1,Toshitaka katada YORITA1,小松YAMAUCHI2,喜田岛MASUI2,Hiroshi丰田2,正树小池百合子2和武田中21三浦公司,39 Minami-Senda-Higashi Naka-ku, Hiroshima-shi,广岛7300054,日本2电子和计算机工程系,广岛技术研究所、211宅一生,Saeki-ku, Hiroshima-shi,广岛7315193,日本

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イリジウム被覆型プローブの開発;イリジウム被覆型プローブの開発;Development of an Iridium-coated Probe

Development of an Iridium-coated Probe Koichi MIYAZONO1, Toshitaka YORITA1, Masayuki YAMAUCHI2, Yoshihiro MASUI2, Hiroshi TOYOTA2, Masaki KOIKE2 and Takeshi TANAKA2 1MIURA CORPORATION, 39 Minami-Senda-Higashi, Naka-ku, Hiroshima-shi, Hiroshima 7300054, Japan 2Department of Electronics and Computer Engineering, Hiroshima Institute of Technology, 211 Miyake, Saeki-ku, Hiroshima-shi, Hiroshima 7315193, Japan

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Journal of The Vacuum Society of Japan

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