浸光处理对太阳能电池用多晶硅薄膜光电性能的影响

C. Álvarez-Macías, B. Monroy, L. Huerta, M. A. Canseco-Martinez, M. Picquart, M. Sanchez, G. Santana
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引用次数: 2

摘要

在这项工作中,我们展示了多晶硅薄膜在长曝光时间光浸泡下光电性能的不同趋势。采用等离子体增强化学气相沉积技术,以二氯硅烷为前驱体,不同的氢稀释度,制备了这些薄膜。在功率密度为100mw /cm2 (AM1.5条件)的白光照射下,连续照射250h后,样品的光电导率表现出奇异行为。不同的趋势被解释为这些薄膜的结晶分数和化学成分的函数。XPS表明,在高氢稀释下生长的一些样品在整个膜中发生氧化过程,而在低氢稀释下生长的其他样品在环境暴露后仅表现出表面氧化。同样,XPS光谱显示了不同的硅氧化态和氯的存在。另一方面,FTIR光谱证明在2000-2150 cm-1附近没有单键和二氢化物Si-H键。这些键通常是导致非晶硅薄膜太阳能电池降解过程的原因。通过对晶体组分和化学成分的控制,可以避免薄膜硅太阳能电池的降解过程。通过XPS和FTIR分析,可以推断出氯和氢相关键的作用,它们可以与薄膜的稳定性水平相关联。在光浸泡15000分钟后,观察了多晶硅薄膜的电导率和光电导率的变化。这些变化取决于薄膜的化学和结构特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of light-soaking treatment on the optoelectronic properties of polymorphous silicon thin films to be used in solar cells
In this work we show the different trends in the optoelectronic properties of polymorphous silicon thin films under light-soaking for long exposure times. These thin films were grown by Plasma Enhanced Chemical Vapor Deposition using dichlorosilane as precursor gas and different hydrogen dilutions. When the samples were illuminated by white light at power density of 100 mW/cm2 (AM1.5 condition) during 250 h continuously, singular behaviors on the photoconductivity measurements were shown. The different trends are explained as a function of the crystalline fraction and chemical composition of these films. XPS shows that an oxidation process takes place throughout the film in some samples grown at high hydrogen dilutions, while other samples grown at low hydrogen dilution show only surface oxidation after ambient exposure. In the same way, XPS spectra show different silicon oxidation states and chlorine presence along of the films. On the other hand, FTIR spectra evidence the absence of mono-and dihydride Si-H bonds around 2000-2150 cm-1. These bonds are generally responsible for the degradation process in amorphous silicon thin films solar cells. With the control of the crystalline fractions and chemical composition, it is possible to avoid the degradation process in thin films silicon solar cells. The role of chlorine and hydrogen related bonds, which can be associated with the level of stability of the films, were inferred from XPS and FTIR analysis. Conductivity and photoconductivity changes on polymorphous silicon thin films were observed when the films are subjected to light-soaking for 15000 minutes. These changes are dependent on the chemical and structural properties of the films.
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