Large area SrTiO/sub 3/ thin films for active microwave applications grown by pulsed laser deposition

Thin films of SrTiO/sub 3/ have been grown by pulsed laser deposition (PLD) on 2" diameter LaAlO/sub 3/ substrates using a technique in which the laser beam is rastered over the radius of a 4 inch diameter target while the substrate is rotated in a radiative blackbody heater. The deposition occurs through a pie shaped opening in the heater. The structure, composition and thickness have been measured using XRD and RBS. The dielectric properties of the film have been measured at 1 MHz utilizing an LCR meter. The results indicate that the films are single phase and [001] oriented. However, film composition, thickness and dielectric properties are not uniform along the radius of the film. The results indicate that the composition nonuniformity is due to off-axis deposition, and correlates with changes in the dielectric properties.