The Influence of Intrinsic Water and Ion Permeation on the Dielectric Properties of Parylene C Films

Parylene C is a widely used dielectric barrier in implantable medical devices because it conforms well to surfaces and insulates against biological environments. However, multiple studies have shown that moisture can intrude into Parylene C films through defects and intrinsic diffusion, leading to delamination and device failure. While many studies have tested device integrity in vitro, few have isolated the influence of specific degradation mechanisms on device failure. Here, we use a broadband impedance technique called Microwave Microfluidic Spectroscopy (MMS) to measure fluid permeation in targeted regions of Parylene C films that are free of defects and have optimal adhesion to the substrate. We found no changes in the broadband S-parameters from 100 MHz–110 GHz for Parylene C coated coplanar waveguides soaked in water or phosphate buffered saline at 20 °C or 37 °C for two months. Furthermore, there was no delamination induced by fluid soaking. Our study helps to clear debate about the influence of water and ion diffusion on Parylene C device lifetime and inform better fabrication of Parylene C coatings for implantable devices.