Preparation of superconducting films by metal organic deposition: — Research and development towards a fault current limiter and other electric devices —@@@― 限流器等への研究展開 ―

1.2 Metal organic deposition (MOD) method The authors had been engaging in the development of ceramic thin film manufacturing process by the metal organic deposition (MOD) method before the discovery of hightemperature superconductors. MOD is a method of “coating and firing” where the metal organic compound containing the constituent elements are dissolved in an organic solvent, this solution is coated onto a substrate, and heat treatment is done to burn off the organic components to form the metal oxide film (Fig. 3).