已建立的MOSFET阈值电压提取方法在10nm技术节点上的比较方法评价

Yashu Swami, Sanjeev Rai
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引用次数: 17

摘要

阈值电压(VTH)是MOSFET工作中最令人回味的方面。对开关过渡特性进行建模是器件约束的关键。通过多种估计技术,提取并评估了器件的精确VTH值。然而,由于各种短通道效应(sce)和设备中存在的非理想性,这些VTH的评估值偏离了确切值。讨论了许多流行的VTH提取方法。所有结果均通过广泛的二维TCAD仿真验证,并通过10纳米技术节点的分析结果得到证实。本研究的目的是探索和比较广泛应用的体驱动纳米mosfet的阈值提取方法,特别是在10nm技术节点和各种sub - 45nm技术节点。简要介绍了阈值提取方法在噪声分析中的应用,以推断纳米技术节点上最合适的提取方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparative Methodical Assessment of Established MOSFET Threshold Voltage Extraction Methods at 10-nm Technology Node
Threshold voltage (VTH) is the most evocative aspect of MOSFET operation. It is the crucial device constraint to model on-off transition characteristics. Precise VTH value of the device is extracted and evaluated by several estimation techniques. However, these assessed values of VTH diverge from the exact values due to various short channel effects (SCEs) and non-idealities present in the device. Numerous prevalent VTH extraction methods are discussed. All the results are verified by extensive 2-D TCAD simulation and confirmed through analytical results at 10-nm technology node. Aim of this research paper is to explore and present a comparative study of largely applied threshold extraction methods for bulk driven nano-MOSFETs especially at 10-nm technology node along with various sub 45-nm technology nodes. Application of the threshold extraction methods to implement noise analysis is briefly presented to infer the most appropriate extraction method at nanometer technology nodes.
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