射频功率和热退火对射频磁控溅射制备氧化锌薄膜性能的影响

4区材料科学 Q2 Engineering

Advances in Materials Science and Engineering Pub Date : 2007-11-20 DOI:10.1155/2007/26459

Chaoyang Li, M. Furuta, T. Matsuda, T. Hiramatsu, H. Furuta, T. Hirao

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引用次数: 9

摘要

采用不同功率的射频磁控溅射法制备了多晶氧化锌(ZnO)薄膜。XRD结果表明，当沉积功率从60 W增加到300 W时，ZnO沿C轴晶粒尺寸减小43%，退火温度上升到400°C时晶粒尺寸增大36%。TDS测量结果显示，ZnO薄膜中原子Zn (60w沉积)和氧分子(180w和300w沉积)的解吸峰均来自300°C。当退火温度大于300°C时，片材的电阻急剧下降，(002)平面的压应力也转变为拉应力。氧化锌薄膜结晶度的对比测量强烈表明，较低的沉积功率和超过300°C的一定的热退火温度都有助于形成高质量的氧化锌薄膜。

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RF Power and Thermal Annealing Effect on the Properties of Zinc Oxide Films Prepared by Radio Frequency Magnetron Sputtering

Polycrystalline zinc oxide (ZnO) films were prepared by radio frequency (RF) magnetron sputtering under different powers. The XRD results showed that ZnO crystallite size along c-axis decreased by 43% with deposition power increased from 60 W to 300 W, increased 36% with annealing temperature rising to 400 ∘ C . TDS measurement revealed that the desorption peaks of both atomic Zn (60 W-deposited) and oxygen molecule (180 W and 300 W-deposited) obtained from ZnO films were originated from 300 ∘ C . When annealing temperature was higher than 300 ∘ C , the sheet resistance dramatically decreased, and compressive stress in the (002) plane changed to tensile stress as well. The comparison measurements of ZnO films crystallinity strongly suggested that both lower deposition power and certain thermal annealing temperature over 300 ∘ C would contribute to the formation of high quality ZnO films.

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来源期刊

Advances in Materials Science and Engineering Materials Science-General Materials Science

CiteScore

3.30

自引率

0.00%

发文量

审稿时长

4-8 weeks

期刊介绍： Advances in Materials Science and Engineering is a broad scope journal that publishes articles in all areas of materials science and engineering including, but not limited to: -Chemistry and fundamental properties of matter -Material synthesis, fabrication, manufacture, and processing -Magnetic, electrical, thermal, and optical properties of materials -Strength, durability, and mechanical behaviour of materials -Consideration of materials in structural design, modelling, and engineering -Green and renewable materials, and consideration of materials’ life cycles -Materials in specialist applications (such as medicine, energy, aerospace, and nanotechnology)