多壁碳纳米管与铜界面的内聚带模型:分子动力学模拟

Ibrahim E Awad, L. Ladani
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引用次数: 12

摘要

由于其优异的机械和电气性能,多壁碳纳米管(MWCNTs)有潜力用于许多纳米/微电子应用,例如通过硅过孔(tsv)、互连、晶体管等。特别是,本研究提出了在铜(Cu)环形圆柱体内使用MWCNT束作为TSV。然而,尺度上的显著差异给界面力学完整性的评价带来了困难。内聚区模型(CZM)通常用于大规模确定界面上的机械粘附。然而,在分子水平上,没有常规的技术可用。分子动力学(MD)模拟用于确定从铜板中分离MWCNTs所需的应力,并生成CZM的法向应力-位移曲线。MWCNT/Cu界面只考虑范德华相互作用。在不同壁数和温度条件下,在垂直于MWCNT轴线方向施加位移控制加载,得到了每种情况下的CZM。此外,还研究了它们对CZM关键参数(法向黏结强度≥Þ和相应的位移≥Þ)的影响。随着纳米碳纳米管壁数的增加,rmax呈非线性减小。最大应力下的位移也随壁数的增加呈非线性减小。研究了温度对应力-位移曲线的影响。当温度超过1 K时,最大法向应力与温度之间没有关系。同样,最大载荷下的位移也没有变化
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Cohesive Zone Model for the Interface of Multiwalled Carbon Nanotubes and Copper: Molecular Dynamics Simulation
Due to their superior mechanical and electrical properties, multiwalled carbon nano- tubes (MWCNTs) have the potential to be used in many nano-/micro-electronic applications, e.g., through silicon vias (TSVs), interconnects, transistors, etc. In particular, use of MWCNT bundles inside annular cylinders of copper (Cu) as TSV is proposed in this study. However, the significant difference in scale makes it difficult to evaluate the interfacial mechanical integrity. Cohesive zone models (CZM) are typically used at large scale to determine the mechanical adherence at the interface. However, at molecular level, no routine technique is available. Molecular dynamic (MD) simulations is used to determine the stresses that are required to separate MWCNTs from a copper slab and generate normal stress–displacement curves for CZM. Only van der Waals (vdW) interaction is considered for MWCNT/Cu interface. A displacement controlled loading was applied in a direction perpendicular to MWCNT’s axis in different cases with different number of walls and at different temperatures and CZM is obtained for each case. Fur- thermore, their effect on the CZM key parameters (normal cohesive strength ð r max Þ and the corresponding displacement ð d n Þ has been studied. By increasing the number of the walls of the MWCNT, r max was found to nonlinearly decrease. Displacement at maximum stress, d n , showed a nonlinear decrease as well with increasing the number of walls. Tem- perature effect on the stress–displacement curves was studied. When temperature was increased beyond 1 K, no relationship was found between the maximum normal stress and temperature. Likewise, the displacement at maximum load did not
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