氩离子束机床对金刚石刀具刃磨的研究

Takenori ONO
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引用次数: 1

摘要

讨论了氩离子束机床对单晶金刚石刀具刃磨的影响。离子等离子体通过改变加工表面的光束照射角度来改变蚀刻速率,从而实现金刚石刀具刃口的锐化。通过加工实验观察了光束辐照方向对刻蚀特性的影响。在这些实验中,利用聚焦离子束(FIB)机床在单点平面刀具的刃口加工成微尺度结构,人工使刃口圆度。然后,由penning离子源产生的氩离子束向不同方向照射在圆形边缘上。在加工试验中观察到,在光束照射的特定倾斜下,边缘的形状不仅被削尖,而且在其圆面上变得与新前刀面一样平坦。在此基础上,进一步改变光束照射方向进行加工。结果,观察到新的平面是按照预定的方向制造的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Sharpening of the diamond tool edge by the Ar ion beam machine tool

Sharpening of the edge on the single crystal diamond cutting tool by Ar ion beam machine tool is discussed. The cutting edge of the diamond tool can be sharpened by the ion plasma because an etching rate is changed by changing the beam irradiation angle on the machining surface. Machining experiments were carried out to observe the effect of the beam irradiation direction on etching characteristics. In these experiments, a single point flat tool is fabricated to the micro scale structure by Focused Ion Beam (FIB) machine tool on its cutting edge to make the edge roundness artificially. Then, the argon ion beam produced by the penning ion sources irradiated on the rounded edge in various direction. In machining tests, it was observed that the shape of edge was not only sharpened, but also made to be the flat as the new rake face on its rounded face by specific inclination of the beam irradiation. Based on this result, the machining was performed by changing the beam irradiation direction additionally. As the result, it is observed that the new flat face is fabricated according to the intended direction.

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