Si(111)表面的碳污染

IF 2.1 4区化学 Q3 CHEMISTRY, PHYSICAL

Surface Science Pub Date : 1969-06-01 DOI:10.1016/0039-6028(69)90151-4

J.M. Charig, D.K. Skinner

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引用次数: 41

摘要

利用调制扫掠缓速电位操作LEED光学器件获得的俄歇电子能谱，研究了超高真空条件下Si(111)表面的清洗及其随后被乙烯蒸气污染。该结果为碳污染对低压硅烷热解外延沉积Si过程中三维生长中心生成的重要性提供了佐证。这种技术对碳的检测水平尚未测量，但它低于在Si (111)-7 LEED模式中产生可识别的视觉变化所必需的水平。探讨了含碳表面层作为热处理函数的行为，并给出了对结果的解释。

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Carbon contamination of Si (111) surfaces

Auger electron spectra obtained by operating LEED optics with a modulated, swept retarding potential have been used to study cleaning of the Si (111) surface and its subsequent contamination by ethylene vapour under ultra high vacuum conditions. The results provide corroborative evidence of the importance of carbon contamination for the generation of three-dimensional growth centres during epitaxial deposition of Si by pyrolysis of silane at low pressures. The detection level for carbon by this technique has not yet been measured but it is lower than that necessary to produce a recognisable visual change in the Si (111)-7 LEED pattern. The behaviour of the carbon-containing surface layer as a function of heat treatment has been explored and an explanation for the results is given.

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来源期刊

Surface Science 化学-物理：凝聚态物理

CiteScore

3.30

自引率

5.30%

发文量

137

审稿时长

25 days

期刊介绍： Surface Science is devoted to elucidating the fundamental aspects of chemistry and physics occurring at a wide range of surfaces and interfaces and to disseminating this knowledge fast. The journal welcomes a broad spectrum of topics, including but not limited to: • model systems (e.g. in Ultra High Vacuum) under well-controlled reactive conditions • nanoscale science and engineering, including manipulation of matter at the atomic/molecular scale and assembly phenomena • reactivity of surfaces as related to various applied areas including heterogeneous catalysis, chemistry at electrified interfaces, and semiconductors functionalization • phenomena at interfaces relevant to energy storage and conversion, and fuels production and utilization • surface reactivity for environmental protection and pollution remediation • interactions at surfaces of soft matter, including polymers and biomaterials. Both experimental and theoretical work, including modeling, is within the scope of the journal. Work published in Surface Science reaches a wide readership, from chemistry and physics to biology and materials science and engineering, providing an excellent forum for cross-fertilization of ideas and broad dissemination of scientific discoveries.