气相沉积二氧化钛薄膜用于改善工作特性的气体传感器

Marina V. Baryshnikova, Leonid A. Filatov, Andrey S. Petrov, Sergey E. Alexandrov
{"title":"气相沉积二氧化钛薄膜用于改善工作特性的气体传感器","authors":"Marina V. Baryshnikova,&nbsp;Leonid A. Filatov,&nbsp;Andrey S. Petrov,&nbsp;Sergey E. Alexandrov","doi":"10.1002/cvde.201507187","DOIUrl":null,"url":null,"abstract":"<div>\n \n <section>\n \n <p>This paper describes the results of experimental evaluation of titanium dioxide thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. TiO<sub>2</sub> layers with a thickness of 90 nm are formed by CVD in the TTIP-O<sub>2</sub>-O<sub>3</sub>-Ar reaction system. Sensors manufactured with titania films formed under all the deposition conditions studied exhibit good electrical response to the ethanol vapors, with quick response-recovery characteristics in the temperature range 170–300 °C. Sensor performance is determined by the relative amount of anatase phase and grain size in the films. The response value (<i>R</i><sub>air</sub>/<i>R</i><sub>ethanol</sub>) of the sample with the highest degree of crystallinity reached 37 at an operating temperature of 200 °C.</p>\n </section>\n </div>","PeriodicalId":10093,"journal":{"name":"Chemical Vapor Deposition","volume":"21 10-11-12","pages":"327-333"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1002/cvde.201507187","citationCount":"18","resultStr":"{\"title\":\"CVD Deposited Titania Thin Films for Gas Sensors with Improved Operating Characteristics\",\"authors\":\"Marina V. Baryshnikova,&nbsp;Leonid A. Filatov,&nbsp;Andrey S. Petrov,&nbsp;Sergey E. Alexandrov\",\"doi\":\"10.1002/cvde.201507187\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div>\\n \\n <section>\\n \\n <p>This paper describes the results of experimental evaluation of titanium dioxide thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. TiO<sub>2</sub> layers with a thickness of 90 nm are formed by CVD in the TTIP-O<sub>2</sub>-O<sub>3</sub>-Ar reaction system. Sensors manufactured with titania films formed under all the deposition conditions studied exhibit good electrical response to the ethanol vapors, with quick response-recovery characteristics in the temperature range 170–300 °C. Sensor performance is determined by the relative amount of anatase phase and grain size in the films. The response value (<i>R</i><sub>air</sub>/<i>R</i><sub>ethanol</sub>) of the sample with the highest degree of crystallinity reached 37 at an operating temperature of 200 °C.</p>\\n </section>\\n </div>\",\"PeriodicalId\":10093,\"journal\":{\"name\":\"Chemical Vapor Deposition\",\"volume\":\"21 10-11-12\",\"pages\":\"327-333\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1002/cvde.201507187\",\"citationCount\":\"18\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Chemical Vapor Deposition\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/cvde.201507187\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chemical Vapor Deposition","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/cvde.201507187","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 18

摘要

本文介绍了用化学气相沉积法制备二氧化钛薄膜作为有源层的实验评价结果。在TTIP-O2-O3-Ar反应体系中,采用CVD法制备了厚度为90nm的TiO2层。在所研究的所有沉积条件下形成的二氧化钛薄膜制造的传感器对乙醇蒸汽表现出良好的电响应,在170-300°C的温度范围内具有快速的响应-恢复特性。传感器的性能取决于薄膜中锐钛矿相的相对数量和晶粒尺寸。在200℃的工作温度下,结晶度最高的样品的响应值(Rair/ re)达到37。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

CVD Deposited Titania Thin Films for Gas Sensors with Improved Operating Characteristics

CVD Deposited Titania Thin Films for Gas Sensors with Improved Operating Characteristics

This paper describes the results of experimental evaluation of titanium dioxide thin films formed by CVD as active layers in semiconductor, resistive sensors for detection of ethanol vapors. TiO2 layers with a thickness of 90 nm are formed by CVD in the TTIP-O2-O3-Ar reaction system. Sensors manufactured with titania films formed under all the deposition conditions studied exhibit good electrical response to the ethanol vapors, with quick response-recovery characteristics in the temperature range 170–300 °C. Sensor performance is determined by the relative amount of anatase phase and grain size in the films. The response value (Rair/Rethanol) of the sample with the highest degree of crystallinity reached 37 at an operating temperature of 200 °C.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Chemical Vapor Deposition
Chemical Vapor Deposition 工程技术-材料科学:膜
自引率
0.00%
发文量
0
审稿时长
>12 weeks
期刊介绍: Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信