热丝CVD制备类石墨烯纳米片的无催化剂生长机理和结构

Chemical Vapor Deposition Pub Date : 2014-06-30 DOI:10.1002/cvde.201407105

Biben Wang, Kun Zheng, Qijin Cheng, Li Wang, Chengcheng Chen, Guobo Dong

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引用次数: 7

摘要

本文报道了一种简单有效的方法，在甲烷前驱体的热丝(HF)CVD沉积碳膜或碳纳米点的硅衬底上合成类石墨烯纳米片。场发射扫描电镜(FESEM)、透射电镜(TEM)和微拉曼光谱(RS)结果表明，类石墨烯纳米片的结构随着甲烷流速的变化和衬底表面预处理而发生变化。类石墨烯纳米片的无催化剂生长与碳原子在衬底表面的扩散和组装以及类石墨烯纳米片与衬底表面的分离有关。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Catalyst-free Growth Mechanism and Structure of Graphene-like Nanosheets Formed by Hot-Filament CVD†

We report on a simple and effective method of synthesizing graphene-like nanosheets on silicon substrates pre-deposited with a carbon film or carbon nanodots in hot-filament(HF)CVD from a methane precursor. The results of field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), and micro-Raman spectroscopy (RS) indicate that the structure of graphene-like nanosheets is changed with the flow rate change of methane and the pretreatment of the substrate surface. The catalyst-free growth of graphene-like nanosheets is related to the diffusion and assembly of carbon atoms on the substrate surface and the separation of graphene-like nanosheets from the substrate surface.

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来源期刊

Chemical Vapor Deposition 工程技术-材料科学：膜

自引率

0.00%

发文量

审稿时长

>12 weeks

期刊介绍： Chemical Vapor Deposition (CVD) publishes Reviews, Short Communications, and Full Papers on all aspects of chemical vapor deposition and related technologies, along with other articles presenting opinion, news, conference information, and book reviews. All papers are peer-reviewed. The journal provides a unified forum for chemists, physicists, and engineers whose publications on chemical vapor deposition have in the past been spread over journals covering inorganic chemistry, materials chemistry, organometallics, applied physics and semiconductor technology, thin films, and ceramic processing.