电感耦合等离子溅射制备氮化钽薄膜的微观结构演变

Q3 Immunology and Microbiology
Sung-Il Baik, Young-Woon Kim
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引用次数: 4

摘要

利用电感耦合等离子体(ICP)辅助直流(DC)溅射生长氮化钽(TaNx)薄膜,获得了20-100%的显微硬度提高。利用透射电子显微镜(TEM)对TaNx薄膜的微观结构变化进行了详细的表征,并将其作为氮气含量和ICP功率的函数进行了表征。随着氮气分数的增加?从0.05到0.15,TaNx阶段从体心立方(bc。TaN0.1,到面心立方(f.c.c) δ-TaN,到六边形紧密堆积(h.c.p.) ε-TaN相。通过增加ICP功率从100?从W到400?W,氟化碳δ- TaN相成为所有氮馏分的主要相。较高的ICP功率增强了Ta和N离子的迁移率,使δ-TaN相稳定,并消除了TaNx膜中柱状晶粒之间的微空隙。致密的δ-TaN结构,减少了柱状晶粒和微孔洞,提高了TaNx膜的强度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Microstructural evolution of tantalum nitride thin films synthesized by inductively coupled plasma sputtering

Microstructural evolution of tantalum nitride thin films synthesized by inductively coupled plasma sputtering

Tantalum nitride (TaNx) thin films were grown utilizing an inductively coupled plasma (ICP) assisted direct current (DC) sputtering, and 20–100% improved microhardness values were obtained. The detailed microstructural changes of the TaNx films were characterized utilizing transmission electron microscopy (TEM), as a function of nitrogen gas fraction and ICP power. As nitrogen gas fraction increases?from 0.05 to 0.15, the TaNx phase evolves from body-centered-cubic (b.c.c.) TaN0.1, to face-centered-cubic (f.c.c.) δ-TaN, to hexagonal-close-packing (h.c.p.) ε-TaN phase. By increasing ICP power from 100?W to 400?W, the f.c.c. δ- TaN phase becomes the main phase in all nitrogen fractions investigated. The higher ICP power enhances the mobility of Ta and N ions, which stabilizes the δ-TaN phase like a high-temperature regime and removes the micro-voids between the columnar grains in the TaNx film. The dense δ-TaN structure with reduced columnar grains and micro-voids increases the strength of the TaNx film.

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来源期刊
Applied Microscopy
Applied Microscopy Immunology and Microbiology-Applied Microbiology and Biotechnology
CiteScore
3.40
自引率
0.00%
发文量
10
审稿时长
10 weeks
期刊介绍: Applied Microscopy is a peer-reviewed journal sponsored by the Korean Society of Microscopy. The journal covers all the interdisciplinary fields of technological developments in new microscopy methods and instrumentation and their applications to biological or materials science for determining structure and chemistry. ISSN: 22875123, 22874445.
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