衍射元件与同步激振扫描相结合的超短激光脉冲高速激光加工

IF 2.3 Q2 OPTICS

Advanced Optical Technologies Pub Date : 2021-10-25 DOI:10.1515/aot-2021-0035

M. Gafner, S. Remund, M. Chaja, B. Neuenschwander

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引用次数: 6

摘要

衍射光学元件或空间光调制器与完全同步的galvo扫描仪的组合为将超短脉冲的加工过程扩展到平均功率为100 W的加工过程提供了可能，同时热影响最小。这将通过高速率多脉冲钻井和特殊强度分布的材料去除来证明，平均功率高达162 W，去除率为16.5 mm3/min。根据实验结果，将讨论实现数万孔/s的钻井速率或10 mm3/min以上的去除速率的策略。

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High-rate laser processing with ultrashort laser pulses by combination of diffractive elements with synchronized galvo scanning

Abstract The combination of diffractive optical elements or spatial light modulators with fully synchronized galvo scanners offers a possibility to scale up machining processes with ultra-short pulses to several 100 W of average power with minimal thermal impact. This will be demonstrated with the high-rate applications multi-pulse drilling on the fly and material removal with special intensity distributions up to an average power of 162 W and a removal rate of 16.5 mm3/min. Based on the experimental results strategies to achieve drilling rates of several 10,000 holes/s or removal rates of multiple 10 mm3/min will be discussed.

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来源期刊

Advanced Optical Technologies OPTICS-

CiteScore

4.40

自引率

0.00%

发文量

期刊介绍： Advanced Optical Technologies is a strictly peer-reviewed scientific journal. The major aim of Advanced Optical Technologies is to publish recent progress in the fields of optical design, optical engineering, and optical manufacturing. Advanced Optical Technologies has a main focus on applied research and addresses scientists as well as experts in industrial research and development. Advanced Optical Technologies partners with the European Optical Society (EOS). All its 4.500+ members have free online access to the journal through their EOS member account. Topics: Optical design, Lithography, Opto-mechanical engineering, Illumination and lighting technology, Precision fabrication, Image sensor devices, Optical materials (polymer based, inorganic, crystalline/amorphous), Optical instruments in life science (biology, medicine, laboratories), Optical metrology, Optics in aerospace/defense, Simulation, interdisciplinary, Optics for astronomy, Standards, Consumer optics, Optical coatings.