Cr Kα激发Si3N4薄膜的高能光电子能谱

{"title":"Cr Kα激发Si3N4薄膜的高能光电子能谱","authors":"P. Deleuze, K. Artyushkova, E. Martinez, O. Renault","doi":"10.1116/6.0001513","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22006,"journal":{"name":"Surface Science Spectra","volume":" ","pages":""},"PeriodicalIF":1.6000,"publicationDate":"2022-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-energy photoelectron spectroscopy of Si3N4 thin film on Si with Cr Kα excitation\",\"authors\":\"P. Deleuze, K. Artyushkova, E. Martinez, O. Renault\",\"doi\":\"10.1116/6.0001513\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":22006,\"journal\":{\"name\":\"Surface Science Spectra\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2022-02-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface Science Spectra\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0001513\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Science Spectra","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0001513","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}