{"title":"垂直结构结控窄带硅光电探测器的仿真研究","authors":"Guang-bin Zhang , Yu-jian Liu , Li Wang","doi":"10.1016/j.mee.2023.112084","DOIUrl":null,"url":null,"abstract":"<div><p><span>Junction-controlled narrow-band Schottky photodetectors<span><span> are very attractive in the optoelectronic<span> systems that operate in a small spectral range, due to its high </span></span>noise immunity, simple structure, and self-powered work mode. In this work, simulation was carried out to study the working mechanism of the junction-controlled narrow-band photodetector based on a vertical </span></span>silicon<span><span> Schottky structure. It is showed that the spectral response of the device is mainly dominated by the quasi-neutral region instead of the </span>depletion region<span><span> of the Schottky structure. Widening quasi-neutral region can obviously red-shift the peak wavelengths of both quasi-neutral region and depletion region, and suppress the device response to short wavelength light. As the doping concentration of the silicon substrate increases, a similar phenomenon can be observed due to the decrease of the diffusion length. Furthermore, increasing </span>surface recombination velocity also can effectively reduce the quantum efficiency of the device at the wavelength <1060 nm. These results signify that junction-controlled narrow-band photodetectors of long-wavelength light can be realized by a variety of simple and feasible methods, indicating their promising application in future photoelectric systems.</span></span></p></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":null,"pages":null},"PeriodicalIF":2.6000,"publicationDate":"2023-10-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simulation-based investigation of junction-controlled narrow-band Si photodetector with vertical structure\",\"authors\":\"Guang-bin Zhang , Yu-jian Liu , Li Wang\",\"doi\":\"10.1016/j.mee.2023.112084\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span>Junction-controlled narrow-band Schottky photodetectors<span><span> are very attractive in the optoelectronic<span> systems that operate in a small spectral range, due to its high </span></span>noise immunity, simple structure, and self-powered work mode. In this work, simulation was carried out to study the working mechanism of the junction-controlled narrow-band photodetector based on a vertical </span></span>silicon<span><span> Schottky structure. It is showed that the spectral response of the device is mainly dominated by the quasi-neutral region instead of the </span>depletion region<span><span> of the Schottky structure. Widening quasi-neutral region can obviously red-shift the peak wavelengths of both quasi-neutral region and depletion region, and suppress the device response to short wavelength light. As the doping concentration of the silicon substrate increases, a similar phenomenon can be observed due to the decrease of the diffusion length. Furthermore, increasing </span>surface recombination velocity also can effectively reduce the quantum efficiency of the device at the wavelength <1060 nm. These results signify that junction-controlled narrow-band photodetectors of long-wavelength light can be realized by a variety of simple and feasible methods, indicating their promising application in future photoelectric systems.</span></span></p></div>\",\"PeriodicalId\":18557,\"journal\":{\"name\":\"Microelectronic Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.6000,\"publicationDate\":\"2023-10-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronic Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0167931723001491\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931723001491","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Simulation-based investigation of junction-controlled narrow-band Si photodetector with vertical structure
Junction-controlled narrow-band Schottky photodetectors are very attractive in the optoelectronic systems that operate in a small spectral range, due to its high noise immunity, simple structure, and self-powered work mode. In this work, simulation was carried out to study the working mechanism of the junction-controlled narrow-band photodetector based on a vertical silicon Schottky structure. It is showed that the spectral response of the device is mainly dominated by the quasi-neutral region instead of the depletion region of the Schottky structure. Widening quasi-neutral region can obviously red-shift the peak wavelengths of both quasi-neutral region and depletion region, and suppress the device response to short wavelength light. As the doping concentration of the silicon substrate increases, a similar phenomenon can be observed due to the decrease of the diffusion length. Furthermore, increasing surface recombination velocity also can effectively reduce the quantum efficiency of the device at the wavelength <1060 nm. These results signify that junction-controlled narrow-band photodetectors of long-wavelength light can be realized by a variety of simple and feasible methods, indicating their promising application in future photoelectric systems.
期刊介绍:
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.