原子力显微镜研究空间技术材料表面的特点和优点

Pub Date : 2023-03-14 DOI:10.15407/knit2023.01.065
O. Shevchenko, A. I. Itsenko, M. Bondarenko
{"title":"原子力显微镜研究空间技术材料表面的特点和优点","authors":"O. Shevchenko, A. I. Itsenko, M. Bondarenko","doi":"10.15407/knit2023.01.065","DOIUrl":null,"url":null,"abstract":"The article presents the advantages of the atomic force microscopy (AFM) method as one of the most versatile and promising methods for studying the surfaces of space engineering materials. A comparison of the results of the study of such materials using the example of aluminum nitride (AlN) by the methods of scanning electron microscopy (SEM) and AFM was carried out. As a result of the comparison, it was established that, despite the higher resolution of the SEM method, its main disadvantages are the impossibility of vertical scanning of surfaces and the lack of an opportunity to study their physical and mechanical properties. The main features of the process of studying the topography of surfaces using the AFM method have been established. They are the possibility of high-precision positioning of the measuring instrument (with the accuracy of determining a given area — up to 40 nm), elimination of distortion of the obtained image of the studied area, and automatic correction of the research speed. The arithmetic mean values of the micro-roughnesses of the aluminum nitride surfaces obtained by the AFM method were determined both for samples that were not exposed to extreme environmental conditions (Ra = 147 nm; Rq = 163 nm) and samples that were exposed to extreme environmental conditions for a long time (120...140 hours), which simulates space conditions (temperature 550 °С, pressure 6.8...7.2 μbar) (Ra = 381 nm; Rq = 422 nm). The maximum porosity in the surface layer (up to 1.5 μm) of aluminum nitride samples was also determined in the range of 3...5.2%.","PeriodicalId":0,"journal":{"name":"","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2023-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"PECULIARITIES AND ADVANTAGES OF STUDYING THE SURFACES OF SPACE TECHNIQUE MATERIALS BY ATOMIC FORCE MICROSCOPY\",\"authors\":\"O. Shevchenko, A. I. Itsenko, M. Bondarenko\",\"doi\":\"10.15407/knit2023.01.065\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The article presents the advantages of the atomic force microscopy (AFM) method as one of the most versatile and promising methods for studying the surfaces of space engineering materials. A comparison of the results of the study of such materials using the example of aluminum nitride (AlN) by the methods of scanning electron microscopy (SEM) and AFM was carried out. As a result of the comparison, it was established that, despite the higher resolution of the SEM method, its main disadvantages are the impossibility of vertical scanning of surfaces and the lack of an opportunity to study their physical and mechanical properties. The main features of the process of studying the topography of surfaces using the AFM method have been established. They are the possibility of high-precision positioning of the measuring instrument (with the accuracy of determining a given area — up to 40 nm), elimination of distortion of the obtained image of the studied area, and automatic correction of the research speed. The arithmetic mean values of the micro-roughnesses of the aluminum nitride surfaces obtained by the AFM method were determined both for samples that were not exposed to extreme environmental conditions (Ra = 147 nm; Rq = 163 nm) and samples that were exposed to extreme environmental conditions for a long time (120...140 hours), which simulates space conditions (temperature 550 °С, pressure 6.8...7.2 μbar) (Ra = 381 nm; Rq = 422 nm). The maximum porosity in the surface layer (up to 1.5 μm) of aluminum nitride samples was also determined in the range of 3...5.2%.\",\"PeriodicalId\":0,\"journal\":{\"name\":\"\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0,\"publicationDate\":\"2023-03-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.15407/knit2023.01.065\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.15407/knit2023.01.065","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

本文介绍了原子力显微镜(AFM)方法作为研究空间工程材料表面最通用、最有前途的方法之一的优点。以氮化铝(AlN)为例,通过扫描电子显微镜(SEM)和AFM的方法对这种材料的研究结果进行了比较。比较结果表明,尽管SEM方法的分辨率较高,但其主要缺点是无法对表面进行垂直扫描,并且缺乏研究其物理和机械性能的机会。建立了利用AFM方法研究表面形貌过程的主要特征。它们是测量仪器高精度定位的可能性(确定给定区域的精度高达40nm),消除所研究区域获得的图像失真,以及自动校正研究速度。通过AFM方法获得的氮化铝表面的微粗糙度的算术平均值对于未暴露于极端环境条件(Ra=147nm;Rq=163nm)的样品和长时间暴露在极端环境条件下(120…140小时)的样品都被确定,模拟空间条件(温度550°С,压力6.8…7.2μbar)(Ra=381 nm;Rq=422 nm)。氮化铝样品表面层(高达1.5μm)的最大孔隙率也在3…5.2%的范围内。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
分享
查看原文
PECULIARITIES AND ADVANTAGES OF STUDYING THE SURFACES OF SPACE TECHNIQUE MATERIALS BY ATOMIC FORCE MICROSCOPY
The article presents the advantages of the atomic force microscopy (AFM) method as one of the most versatile and promising methods for studying the surfaces of space engineering materials. A comparison of the results of the study of such materials using the example of aluminum nitride (AlN) by the methods of scanning electron microscopy (SEM) and AFM was carried out. As a result of the comparison, it was established that, despite the higher resolution of the SEM method, its main disadvantages are the impossibility of vertical scanning of surfaces and the lack of an opportunity to study their physical and mechanical properties. The main features of the process of studying the topography of surfaces using the AFM method have been established. They are the possibility of high-precision positioning of the measuring instrument (with the accuracy of determining a given area — up to 40 nm), elimination of distortion of the obtained image of the studied area, and automatic correction of the research speed. The arithmetic mean values of the micro-roughnesses of the aluminum nitride surfaces obtained by the AFM method were determined both for samples that were not exposed to extreme environmental conditions (Ra = 147 nm; Rq = 163 nm) and samples that were exposed to extreme environmental conditions for a long time (120...140 hours), which simulates space conditions (temperature 550 °С, pressure 6.8...7.2 μbar) (Ra = 381 nm; Rq = 422 nm). The maximum porosity in the surface layer (up to 1.5 μm) of aluminum nitride samples was also determined in the range of 3...5.2%.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信