Dong Hwan Kim, Young Jung, Kyungkuk Jung, Dong Hwa Kwak, Dong Min Park, Myung Gyu Shin, Hyeong Jun Tak, Jong Soo Ko
{"title":"中空聚二甲基硅氧烷(PDMS)泡沫,具有3D互连网络,用于高灵敏度电容压力传感器","authors":"Dong Hwan Kim, Young Jung, Kyungkuk Jung, Dong Hwa Kwak, Dong Min Park, Myung Gyu Shin, Hyeong Jun Tak, Jong Soo Ko","doi":"10.1186/s40486-020-00127-8","DOIUrl":null,"url":null,"abstract":"<p>We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (>?86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.</p>","PeriodicalId":704,"journal":{"name":"Micro and Nano Systems Letters","volume":"8 1","pages":""},"PeriodicalIF":4.7000,"publicationDate":"2020-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1186/s40486-020-00127-8","citationCount":"13","resultStr":"{\"title\":\"Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors\",\"authors\":\"Dong Hwan Kim, Young Jung, Kyungkuk Jung, Dong Hwa Kwak, Dong Min Park, Myung Gyu Shin, Hyeong Jun Tak, Jong Soo Ko\",\"doi\":\"10.1186/s40486-020-00127-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (>?86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.</p>\",\"PeriodicalId\":704,\"journal\":{\"name\":\"Micro and Nano Systems Letters\",\"volume\":\"8 1\",\"pages\":\"\"},\"PeriodicalIF\":4.7000,\"publicationDate\":\"2020-12-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1186/s40486-020-00127-8\",\"citationCount\":\"13\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nano Systems Letters\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://link.springer.com/article/10.1186/s40486-020-00127-8\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"NANOSCIENCE & NANOTECHNOLOGY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nano Systems Letters","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1186/s40486-020-00127-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"NANOSCIENCE & NANOTECHNOLOGY","Score":null,"Total":0}
Hollow polydimethylsiloxane (PDMS) foam with a 3D interconnected network for highly sensitive capacitive pressure sensors
We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (>?86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.