DLC涂层椭圆数据评估的全局搜索方法与模型选择标准的结合

IF 2.3 Q2 OPTICS

Advanced Optical Technologies Pub Date : 2022-07-18 DOI:10.1515/aot-2022-0014

K. Dorywalski, O. Lupicka, M. Grundmann, C. Sturm

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引用次数: 1

摘要

摘要提出了一种将全局搜索优化算法与统计模型选择准则相结合的椭圆偏振光谱实验数据评价方法。采用混合遗传梯度搜索算法(HGGA)求解SW7M不锈钢表面类金刚石(DLC)涂层的光学参数和厚度。采用赤池准则和贝叶斯信息准则对不同的介电函数模型进行了评价。该方法能够在材料光学常数初始知识有限的情况下求出光学模型参数。同时，可以从候选模型中明确选择描述材料光学性质的最优介电函数模型。

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Combination of a global-search method with model selection criteria for the ellipsometric data evaluation of DLC coatings

Abstract A method for the evaluation of experimental data from spectroscopic ellipsometry is proposed which combines the global-search optimization algorithm with statistical model selection criteria. The hybrid genetic-gradient search algorithm (HGGA) is applied to find the optical parameters and thickness of a diamond-like carbon (DLC) coating deposited on SW7M stainless steel. Akaike and Bayesian information criteria are used to evaluate the different dielectric function models. The method is able to find optical model parameters even in case of a limited initial knowledge about the material optical constants. At the same time, the optimal dielectric function model for the description of the material optical properties can be selected unambiguously from the set of candidate models.

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来源期刊

Advanced Optical Technologies OPTICS-

CiteScore

4.40

自引率

0.00%

发文量

期刊介绍： Advanced Optical Technologies is a strictly peer-reviewed scientific journal. The major aim of Advanced Optical Technologies is to publish recent progress in the fields of optical design, optical engineering, and optical manufacturing. Advanced Optical Technologies has a main focus on applied research and addresses scientists as well as experts in industrial research and development. Advanced Optical Technologies partners with the European Optical Society (EOS). All its 4.500+ members have free online access to the journal through their EOS member account. Topics: Optical design, Lithography, Opto-mechanical engineering, Illumination and lighting technology, Precision fabrication, Image sensor devices, Optical materials (polymer based, inorganic, crystalline/amorphous), Optical instruments in life science (biology, medicine, laboratories), Optical metrology, Optics in aerospace/defense, Simulation, interdisciplinary, Optics for astronomy, Standards, Consumer optics, Optical coatings.