Jun-gu Kang, Joon-Shik Park, Kwang-Bum Park, Junho Shin, Eung-An Lee, Sangsoo Noh, Hoo-Jeong Lee
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Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor
Pt thin film temperature sensors (Pt T sensors) are embedded in micro gas sensors to measure and control the working temperature. We characterized electrical resistances of Pt T sensors and micro heaters with temperature changing in the oven and by Joule heating. In order to enhance the accuracy of temperature measurement by the Pt T sensors, we investigated the correlation among the Pt T sensor, micro heater, and the working temperature, which was linear proportional relation expressed as the equation: T2?=?6.466R1–642.8, where T2?=?temperature of the Pt micro heater and R1?=?the electrical resistance of the Pt T sensor. As the error by physically separated gap between Pt T sensor and micro heater calibrated, measuring and controlling temperature of micro heater in micro gas sensors were possible through the Pt T sensors. For the practical use of Pt T sensor in micro gas sensor, the gas sensing properties of fabricated micro gas sensors to 25?ppm CO and 1?ppm HCHO gases were characterized.
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