EELS法与CBED法测量试件厚度的对比研究

Q3 Immunology and Microbiology
Yoon-Uk Heo
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引用次数: 10

摘要

比较了电子能量损失谱(EELS)和10a会聚束电子衍射(CBED)两种测量Fe-18Mn-0.7C合金厚度的方法。首先对薄片试样进行倾斜,使其满足10a双梁条件。在扫描透射电子显微镜(STEM)和TEM-CBED模式下,获得了两束条件下EELS和CBED模式的低损耗谱。采用对数比法测量薄箔厚度。科塞尔- m ?分析了\( \mathbf{13}\overline{\mathbf{1}} \)奥氏体衍射盘的llenstedt (K-M)条纹厚度。结果表明,两种方法在厚度为72?113?Nm,差值小于5%.
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Comparative study on the specimen thickness measurement using EELS and CBED methods

Comparative study on the specimen thickness measurement using EELS and CBED methods

Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio method was used for measuring the thin foil thickness. Kossel-M?llenstedt (K-M) fringe of the \( \mathbf{13}\overline{\mathbf{1}} \) diffracted disk of austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in the thickness range of 72?~?113?nm with a difference of less than 5%.

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来源期刊
Applied Microscopy
Applied Microscopy Immunology and Microbiology-Applied Microbiology and Biotechnology
CiteScore
3.40
自引率
0.00%
发文量
10
审稿时长
10 weeks
期刊介绍: Applied Microscopy is a peer-reviewed journal sponsored by the Korean Society of Microscopy. The journal covers all the interdisciplinary fields of technological developments in new microscopy methods and instrumentation and their applications to biological or materials science for determining structure and chemistry. ISSN: 22875123, 22874445.
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