Jian Jin , Jun Wu , Zhenhua Yu , Zhong Wang , Xudi Wang
{"title":"基于3D打印模具和真空辅助变形复制工艺的曲面MLA光栅制作","authors":"Jian Jin , Jun Wu , Zhenhua Yu , Zhong Wang , Xudi Wang","doi":"10.1016/j.mee.2023.112059","DOIUrl":null,"url":null,"abstract":"<div><p><span><span>The combination of Microlens Array (MLA) with a grating structure is an effective means of improving light shaping efficiency due to the light dispersion effects of both elements. This paper proposes an innovative method for fabricating a curved MLA-grating composite element using a </span>3D printing mold and vacuum-assisted deformation replication process. In addition to the cost advantages of the process, the </span>optical parameters<span><span><span> such as type and line-density of grating, curvature and aperture size of the microlens can be effectively controlled, so as to bring different diffraction and focusing effects. Test results demonstrate that the curved MLA-grating element has superior light dispersion efficiency, making it useful in improving the illumination range of light sources. Additionally, due to the focusing effect of the curved substrate, this element holds promise for enhancing the </span>light energy utilization rate in the </span>photovoltaic field.</span></p></div>","PeriodicalId":18557,"journal":{"name":"Microelectronic Engineering","volume":null,"pages":null},"PeriodicalIF":2.6000,"publicationDate":"2023-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of curved MLA-grating based on 3D printing mold and vacuum-assisted deformation replication process\",\"authors\":\"Jian Jin , Jun Wu , Zhenhua Yu , Zhong Wang , Xudi Wang\",\"doi\":\"10.1016/j.mee.2023.112059\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span><span>The combination of Microlens Array (MLA) with a grating structure is an effective means of improving light shaping efficiency due to the light dispersion effects of both elements. This paper proposes an innovative method for fabricating a curved MLA-grating composite element using a </span>3D printing mold and vacuum-assisted deformation replication process. In addition to the cost advantages of the process, the </span>optical parameters<span><span><span> such as type and line-density of grating, curvature and aperture size of the microlens can be effectively controlled, so as to bring different diffraction and focusing effects. Test results demonstrate that the curved MLA-grating element has superior light dispersion efficiency, making it useful in improving the illumination range of light sources. Additionally, due to the focusing effect of the curved substrate, this element holds promise for enhancing the </span>light energy utilization rate in the </span>photovoltaic field.</span></p></div>\",\"PeriodicalId\":18557,\"journal\":{\"name\":\"Microelectronic Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.6000,\"publicationDate\":\"2023-07-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microelectronic Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0167931723001247\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microelectronic Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167931723001247","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Fabrication of curved MLA-grating based on 3D printing mold and vacuum-assisted deformation replication process
The combination of Microlens Array (MLA) with a grating structure is an effective means of improving light shaping efficiency due to the light dispersion effects of both elements. This paper proposes an innovative method for fabricating a curved MLA-grating composite element using a 3D printing mold and vacuum-assisted deformation replication process. In addition to the cost advantages of the process, the optical parameters such as type and line-density of grating, curvature and aperture size of the microlens can be effectively controlled, so as to bring different diffraction and focusing effects. Test results demonstrate that the curved MLA-grating element has superior light dispersion efficiency, making it useful in improving the illumination range of light sources. Additionally, due to the focusing effect of the curved substrate, this element holds promise for enhancing the light energy utilization rate in the photovoltaic field.
期刊介绍：
Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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