利用微机械臂制备TEM样品进行原位MEMS实验

Q3 Immunology and Microbiology

Applied Microscopy Pub Date : 2021-06-09 DOI:10.1186/s42649-021-00057-8

Hyunjong Lee, Odongo Francis Ngome Okello, Gi-Yeop Kim, Kyung Song, Si-Young Choi

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引用次数: 2

摘要

在原子分辨率上理解复杂的纳米尺度现象的需求日益增长，这吸引了原位透射电子显微镜(TEM)技术来了解它们的动力学。然而，用于原位观察的简单到安全的TEM样品制备受到了限制。在此，我们提出了一种基于光学显微镜的微操作系统来转移TEM样品。采用该机械手系统，可在微机电系统(MEMS)芯片上一步完成从纳米线到片状薄样的多种类型样品的转移。此外，样品和探针尖之间的静电力控制是传递过程的关键。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

TEM sample preparation using micro-manipulator for in-situ MEMS experiment

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TEM sample preparation using micro-manipulator for in-situ MEMS experiment

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

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来源期刊

Applied Microscopy Immunology and Microbiology-Applied Microbiology and Biotechnology

CiteScore

3.40

自引率

0.00%

发文量

审稿时长

10 weeks

期刊介绍： Applied Microscopy is a peer-reviewed journal sponsored by the Korean Society of Microscopy. The journal covers all the interdisciplinary fields of technological developments in new microscopy methods and instrumentation and their applications to biological or materials science for determining structure and chemistry. ISSN: 22875123, 22874445.