采用金属氧化物薄膜晶体管和优化的MEMS元件的高性能MEMS快门显示器

IF 1.7 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of the Society for Information Display Pub Date : 2023-08-14 DOI:10.1002/jsid.1252

Sheikh Abdullah Al Nusayer, Patrick Schalberger, Holger Baur, Florian Kleber, Norbert Fruehauf

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引用次数: 0

摘要

有源矩阵预应力微机电快门显示器实现了卓越的光学性能以及稳健的操作性能。微机电系统（MEMS）快门元件已经被优化为具有较低操作电压和较高像素密度的较高光输出耦合效率。MEMS元件已与自对准金属氧化物薄膜晶体管（TFT）共同制造。为了在不妨碍两个元件性能的情况下集成MEMS工艺，需要进行一些优化。优化的显示工艺只需要七个光刻掩模，确保MEMS快门和金属氧化物TFT工艺之间的适当兼容性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

High-performance MEMS shutter display with metal-oxide thin-film transistors and optimized MEMS element

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High-performance MEMS shutter display with metal-oxide thin-film transistors and optimized MEMS element

Active matrix prestressed microelectromechanical shutter displays enable outstanding optical properties as well as robust operating performance. The microelectromechanical systems (MEMS) shutter elements have been optimized for higher light outcoupling efficiency with lower operation voltage and higher pixel density. The MEMS elements have been co-fabricated with self-aligned metal-oxide thin-film transistors (TFTs). Several optimizations were required to integrate MEMS process without hampering the performance of both elements. The optimized display process requires only seven photolithographic masks with ensuring proper compatibility between MEMS shutter and metal-oxide TFT process.

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来源期刊

Journal of the Society for Information Display 工程技术-材料科学：综合

CiteScore

4.80

自引率

8.70%

发文量

审稿时长

3 months

期刊介绍： The Journal of the Society for Information Display publishes original works dealing with the theory and practice of information display. Coverage includes materials, devices and systems; the underlying chemistry, physics, physiology and psychology; measurement techniques, manufacturing technologies; and all aspects of the interaction between equipment and its users. Review articles are also published in all of these areas. Occasional special issues or sections consist of collections of papers on specific topical areas or collections of full length papers based in part on oral or poster presentations given at SID sponsored conferences.