不同浓度MgO薄膜的合成及物理性能表征

Q4 Engineering
N. Chaouch, S. Benramache, S. Lakel
{"title":"不同浓度MgO薄膜的合成及物理性能表征","authors":"N. Chaouch, S. Benramache, S. Lakel","doi":"10.4071/imaps.963453","DOIUrl":null,"url":null,"abstract":"\n In this work, magnesium oxide was elaborated on a glass substrate at 450°C by a pneumatic spray technique. The structural, optical, and electrical properties were studied at different MgO concentrations (.05, .10, .15, and .2 mol L−1). Poly-crystalline MgO films with a cubic structure with a strong (002) preferred orientation were observed at all sprayed films, with a maximum crystallite size of 21.4 nm attained by the sprayed film at .2 mol L−1. Good transmission was found in the deposited MgO thin films with lowest molarity. The transmission of MgO thin films decreases rapidly as the wavelength increases in the range of 300–400 nm and then increases slowly at higher wavelengths. The bandgap of MgO thin films decreases as the molarity increases, and the band gap values range between 4.8 and 4.3 eV. The Urbach energy values range between 375 and 519 meV. The electrical resistance of our films is on the order of 2 × 107Ω. The prepared MgO thin films were suitable for electronic packaging; they are capable to provide very stable and high secondary electron emission combined with low bandgap energy and low electrical resistance.","PeriodicalId":35312,"journal":{"name":"Journal of Microelectronics and Electronic Packaging","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Synthesis and Characterization of Physical Properties of MgO Thin Films by Various Concentrations\",\"authors\":\"N. Chaouch, S. Benramache, S. Lakel\",\"doi\":\"10.4071/imaps.963453\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n In this work, magnesium oxide was elaborated on a glass substrate at 450°C by a pneumatic spray technique. The structural, optical, and electrical properties were studied at different MgO concentrations (.05, .10, .15, and .2 mol L−1). Poly-crystalline MgO films with a cubic structure with a strong (002) preferred orientation were observed at all sprayed films, with a maximum crystallite size of 21.4 nm attained by the sprayed film at .2 mol L−1. Good transmission was found in the deposited MgO thin films with lowest molarity. The transmission of MgO thin films decreases rapidly as the wavelength increases in the range of 300–400 nm and then increases slowly at higher wavelengths. The bandgap of MgO thin films decreases as the molarity increases, and the band gap values range between 4.8 and 4.3 eV. The Urbach energy values range between 375 and 519 meV. The electrical resistance of our films is on the order of 2 × 107Ω. The prepared MgO thin films were suitable for electronic packaging; they are capable to provide very stable and high secondary electron emission combined with low bandgap energy and low electrical resistance.\",\"PeriodicalId\":35312,\"journal\":{\"name\":\"Journal of Microelectronics and Electronic Packaging\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Microelectronics and Electronic Packaging\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.4071/imaps.963453\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Engineering\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectronics and Electronic Packaging","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4071/imaps.963453","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 1

摘要

在这项工作中,通过气动喷涂技术在450°C的玻璃基板上制备氧化镁。研究了不同MgO浓度下材料的结构、光学和电学性能。0.05、0.10、0.15和0.2 mol L−1)。结果表明,在0.2 mol L−1的温度下,喷涂膜的晶粒尺寸最大可达21.4 nm。在最低摩尔浓度的MgO薄膜中发现了良好的透射率。在300 ~ 400 nm波长范围内,MgO薄膜的透射率随波长的增加而迅速下降,在更高波长处则缓慢增加。MgO薄膜的带隙随摩尔浓度的增加而减小,带隙值在4.8 ~ 4.3 eV之间。厄巴赫能量值在375和519 meV之间。我们薄膜的电阻约为2 × 107Ω。制备的MgO薄膜适用于电子封装;它们能够提供非常稳定和高的二次电子发射,同时具有低带隙能量和低电阻。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis and Characterization of Physical Properties of MgO Thin Films by Various Concentrations
In this work, magnesium oxide was elaborated on a glass substrate at 450°C by a pneumatic spray technique. The structural, optical, and electrical properties were studied at different MgO concentrations (.05, .10, .15, and .2 mol L−1). Poly-crystalline MgO films with a cubic structure with a strong (002) preferred orientation were observed at all sprayed films, with a maximum crystallite size of 21.4 nm attained by the sprayed film at .2 mol L−1. Good transmission was found in the deposited MgO thin films with lowest molarity. The transmission of MgO thin films decreases rapidly as the wavelength increases in the range of 300–400 nm and then increases slowly at higher wavelengths. The bandgap of MgO thin films decreases as the molarity increases, and the band gap values range between 4.8 and 4.3 eV. The Urbach energy values range between 375 and 519 meV. The electrical resistance of our films is on the order of 2 × 107Ω. The prepared MgO thin films were suitable for electronic packaging; they are capable to provide very stable and high secondary electron emission combined with low bandgap energy and low electrical resistance.
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来源期刊
Journal of Microelectronics and Electronic Packaging
Journal of Microelectronics and Electronic Packaging Engineering-Electrical and Electronic Engineering
CiteScore
1.30
自引率
0.00%
发文量
5
期刊介绍: The International Microelectronics And Packaging Society (IMAPS) is the largest society dedicated to the advancement and growth of microelectronics and electronics packaging technologies through professional education. The Society’s portfolio of technologies is disseminated through symposia, conferences, workshops, professional development courses and other efforts. IMAPS currently has more than 4,000 members in the United States and more than 4,000 international members around the world.
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