表面粗糙度对介电膜性能影响的研究进展

IF 3.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Guanghui Song, Yaojin Wang, Daniel Q. Tan
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引用次数: 22

摘要

相对于介电材料的体积特性,表面粗糙度的重要性常常被忽视。表面粗糙度或不同材料层之间的界面通常会显著影响薄膜的外部性能。表面粗糙度在许多材料特性中具有共性和关键性的影响。本文综述了近年来有关表面粗糙度对介电薄膜的机械、热、物理和介电性能影响的研究进展。适当的粗糙度有利于附着力,过滤,生物污垢,摩擦学性能和磁性。然而,较低的粗糙度通常有利于介电材料的介电性能,其厚度从几纳米到50 μm不等。本文讨论了表面粗糙度的控制和测量技术。它强调了样品表面粗糙度的重要性和特征,以便更好地理解介电现象、机制和各种介电薄膜的电应力测试设置。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

A review of surface roughness impact on dielectric film properties

A review of surface roughness impact on dielectric film properties

The importance of surface roughness with respect to the bulk properties of dielectric materials is often overlooked. Surface roughness or interfaces between different material layers often significantly affects the external properties of thin films. Surface roughness holds its commonalty and critical impact among many materials properties. This review summarises the recent work on the effect of surface roughness on the mechanical, thermal, physical, and dielectric properties of dielectric films. Appropriate roughness favours adhesion, filtration, biological fouling, tribological properties, and magnetic properties. Nevertheless, lower roughness generally benefits the dielectric properties of dielectric materials, with thicknesses ranging from a few nanometres to up to 50 μm. This review discusses surface roughness control and the techniques of measurement as well. It emphasises the importance and characterisation of sample surface roughness for a better understanding of the dielectric phenomenon, mechanisms, and electrical stress test setup for various dielectric films.

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来源期刊
IET Nanodielectrics
IET Nanodielectrics Materials Science-Materials Chemistry
CiteScore
5.60
自引率
3.70%
发文量
7
审稿时长
21 weeks
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