Investigating the structure of the oxide on Ni‐Cr‐Mo alloys while presenting a method for analysis of complex oxides using QUASES

X‐ray photoelectron spectroscopy (XPS) is a technique that is widely used to study thin oxide films because of its extremely high surface sensitivity. Utilizing the QUASES (Quantitative Analysis of Surfaces by Electron Spectroscopy) software package developed by Sven Tougaard (University of Southern Denmark), a user can obtain additional information that is not extracted in conventional XPS analysis, specifically the composition as a function of depth. Presented here is the QUASES analysis of four Ni‐Cr‐Mo alloys performed while testing various inelastic mean free path (IMFP) determination methods in the context of providing a framework for the analysis of complex oxides in QUASES. Ni‐Cr‐Mo alloys are often used to replace conventional materials under aggressive conditions, because of their exceptional corrosion resistance. Their corrosion resistance is conferred by the formation of an inert surface oxide film that protects the underlying metal. Using the QUASES software, the thickness of the air‐formed oxide on four Ni‐Cr‐Mo alloys was found to lie within the range of 2.5–3.6 nm. They were found to be composed of an inner Cr2O3 layer and an outer Cr (OH)3 layer, with a transition zone where the two coexisted. Oxidized Mo species, MoO2 and MoO3, were found in trace amounts at the boundary between the Cr2O3‐only and mixed Cr2O3/Cr (OH)3 regions of the oxide. We also determined that using 20% reduced IMFP values gave results similar to those obtained using electron effective attenuation length (EAL) values. Auger depth profiles showed comparable trends to the QUASES models.