微型原子钟用894.6 nm波长外溢材料的VCSEL快速制备

IF 2.3 4区计算机科学 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Iet Optoelectronics Pub Date : 2022-11-11 DOI:10.1049/ote2.12082

Jack Baker, Craig. P. Allford, Sara. Gillgrass, Tomas. Peach, James Meiklejohn, Curtis Hentschel, Wyn Meredith, Denise Powell, Tracy Sweet, Mohsin Haji, J. Iwan Davies, Samuel Shutts, Peter M. Smowton

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引用次数: 0

摘要

将垂直腔面发射激光(VCSEL)快速制造(VQF)工艺应用于微型原子钟外延材料设计。该工艺用于评估整个100毫米(4英寸)晶圆的材料质量和均匀性，以满足mac的vcsel严格的目标规格。在晶圆的大部分上实现了光功率(> 0.6 mW)和差分效率(< 0.5 W/A)的目标规格;然而，氧化物孔径直径的变化限制了产率。基模的发射

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VCSEL quick fabrication of 894.6 nm wavelength epi-material for miniature atomic clock applications

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VCSEL quick fabrication of 894.6 nm wavelength epi-material for miniature atomic clock applications

A vertical cavity surface emitting laser (VCSEL) quick fabrication (VQF) process is applied to epitaxial materials designed for miniature atomic clock applications (MACs). The process is used to assess material quality and uniformity of a full 100 mm (4 ‐ inch) wafer against the stringent target specification of VCSELs for MACs. Target specifications in optical power ( > 0.6 mW) and differential efficiencies ( < 0.5 W/A) are achieved over large portions of a wafer; however, the variation in the oxide aperture diameter is shown to limit the yield. The emission of the fundamental mode

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来源期刊

Iet Optoelectronics 工程技术-电信学

CiteScore

4.50

自引率

0.00%

发文量

审稿时长

6 months

期刊介绍： IET Optoelectronics publishes state of the art research papers in the field of optoelectronics and photonics. The topics that are covered by the journal include optical and optoelectronic materials, nanophotonics, metamaterials and photonic crystals, light sources (e.g. LEDs, lasers and devices for lighting), optical modulation and multiplexing, optical fibres, cables and connectors, optical amplifiers, photodetectors and optical receivers, photonic integrated circuits, photonic systems, optical signal processing and holography and displays. Most of the papers published describe original research from universities and industrial and government laboratories. However correspondence suggesting review papers and tutorials is welcomed, as are suggestions for special issues. IET Optoelectronics covers but is not limited to the following topics: Optical and optoelectronic materials Light sources, including LEDs, lasers and devices for lighting Optical modulation and multiplexing Optical fibres, cables and connectors Optical amplifiers Photodetectors and optical receivers Photonic integrated circuits Nanophotonics and photonic crystals Optical signal processing Holography Displays