{"title":"具有wox通道的hzo型铁电场效应晶体管的物理建模","authors":"X. Wen, M. Halter, L. Bégon-Lours, M. Luisier","doi":"10.3389/fnano.2022.900592","DOIUrl":null,"url":null,"abstract":"The quasistatic and transient transfer characteristics of Hf0.57Zr0.43O2 (HZO)-based ferroelectric field-effect transistors (FeFETs) with a WO x channel are investigated using a 2-D time-dependent Ginzburg-Landau model as implemented in a state-of-the-art technology computer aided design tool. Starting from an existing FeFET configuration, the influence of different design parameters and geometries is analyzed before providing guidelines for next-generation devices with an increased “high (R H ) to low (R L )” resistance ratio, i.e., R H /R L . The suitability of FeFETs as solid-state synapses in memristive crossbar arrays depends on this parameter. Simulations predict that a 13 times larger R H /R L ratio can be achieved in a double-gate FeFET, as compared to a back-gated one with the same channel geometry and ferroelectric layer. The observed improvement can be attributed to the enhanced electrostatic control over the semiconducting channel thanks to the addition of a second gate. A similar effect is obtained by thinning either the HZO dielectric or the WO x channel. These findings could pave the way for FeFETs with enhanced synaptic-like properties that play a key role in future neuromorphic computing applications.","PeriodicalId":34432,"journal":{"name":"Frontiers in Nanotechnology","volume":" ","pages":""},"PeriodicalIF":4.1000,"publicationDate":"2022-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Physical modeling of HZO-based ferroelectric field-effect transistors with a WO x channel\",\"authors\":\"X. Wen, M. Halter, L. Bégon-Lours, M. Luisier\",\"doi\":\"10.3389/fnano.2022.900592\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The quasistatic and transient transfer characteristics of Hf0.57Zr0.43O2 (HZO)-based ferroelectric field-effect transistors (FeFETs) with a WO x channel are investigated using a 2-D time-dependent Ginzburg-Landau model as implemented in a state-of-the-art technology computer aided design tool. Starting from an existing FeFET configuration, the influence of different design parameters and geometries is analyzed before providing guidelines for next-generation devices with an increased “high (R H ) to low (R L )” resistance ratio, i.e., R H /R L . The suitability of FeFETs as solid-state synapses in memristive crossbar arrays depends on this parameter. Simulations predict that a 13 times larger R H /R L ratio can be achieved in a double-gate FeFET, as compared to a back-gated one with the same channel geometry and ferroelectric layer. The observed improvement can be attributed to the enhanced electrostatic control over the semiconducting channel thanks to the addition of a second gate. A similar effect is obtained by thinning either the HZO dielectric or the WO x channel. These findings could pave the way for FeFETs with enhanced synaptic-like properties that play a key role in future neuromorphic computing applications.\",\"PeriodicalId\":34432,\"journal\":{\"name\":\"Frontiers in Nanotechnology\",\"volume\":\" \",\"pages\":\"\"},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2022-08-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Frontiers in Nanotechnology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3389/fnano.2022.900592\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Frontiers in Nanotechnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3389/fnano.2022.900592","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 1
摘要
利用二维时间相关的金兹堡-朗道模型,研究了具有WO x沟道的Hf0.57Zr0.43O2 (HZO)基铁电场效应晶体管(fefet)的准静态和瞬态转移特性。从现有的ffet结构出发,分析了不同设计参数和几何形状的影响,然后为具有更高的“高(R H)到低(R L)”电阻比(即R H /R L)的下一代器件提供指导。在忆阻交叉棒阵列中,效应场效应管作为固态突触的适用性取决于这个参数。模拟结果表明,与具有相同通道几何形状和铁电层的背门控场效应管相比,双栅场效应管的rh / rl比可以提高13倍。所观察到的改进可归因于由于增加了第二个栅极而增强了对半导体通道的静电控制。通过稀释HZO电介质或wox通道可以获得类似的效果。这些发现可能为具有增强突触样特性的效应场效应管铺平道路,这些特性在未来的神经形态计算应用中发挥关键作用。
Physical modeling of HZO-based ferroelectric field-effect transistors with a WO x channel
The quasistatic and transient transfer characteristics of Hf0.57Zr0.43O2 (HZO)-based ferroelectric field-effect transistors (FeFETs) with a WO x channel are investigated using a 2-D time-dependent Ginzburg-Landau model as implemented in a state-of-the-art technology computer aided design tool. Starting from an existing FeFET configuration, the influence of different design parameters and geometries is analyzed before providing guidelines for next-generation devices with an increased “high (R H ) to low (R L )” resistance ratio, i.e., R H /R L . The suitability of FeFETs as solid-state synapses in memristive crossbar arrays depends on this parameter. Simulations predict that a 13 times larger R H /R L ratio can be achieved in a double-gate FeFET, as compared to a back-gated one with the same channel geometry and ferroelectric layer. The observed improvement can be attributed to the enhanced electrostatic control over the semiconducting channel thanks to the addition of a second gate. A similar effect is obtained by thinning either the HZO dielectric or the WO x channel. These findings could pave the way for FeFETs with enhanced synaptic-like properties that play a key role in future neuromorphic computing applications.