蒸发光学镀膜的行星旋转系统分析。

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2016-10-20 DOI:10.1364/AO.55.008550

J B Oliver

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引用次数: 11

摘要

分析了行星设计考虑因素对光学镀膜沉积的影响，包括行星的理想数量、系统性能的变化以及行星运动与理想的偏差。系统容量在四个行星上达到最大，尽管衬底尺寸会显著影响这一结果。基于不同误差模式的相对影响，为高性能沉积系统的设计提供指导。行星安装中的错误，如行星表面不垂直于旋转轴是特别有问题的，这表明行星的设计修改将是适当的。

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Analysis of a planetary-rotation system for evaporated optical coatings.

The impact of planetary design considerations for optical coating deposition is analyzed, including the ideal number of planets, variations in system performance, and the deviation of planet motion from the ideal. System capacity is maximized for four planets, although substrate size can significantly influence this result. Guidance is provided in the design of high-performance deposition systems based on the relative impact of different error modes. Errors in planet mounting such that the planet surface is not perpendicular to the axis of rotation are particularly problematic, suggesting planetary design modifications would be appropriate.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.