Mingjun Qiu , Weiwei Du , Shangyu Zhou , Pengzhe Cai , Yingwu Luo , Xiaoxue Wang , Rong Yang , Junjie Zhao
{"title":"聚合物薄膜非光刻图像化研究进展","authors":"Mingjun Qiu , Weiwei Du , Shangyu Zhou , Pengzhe Cai , Yingwu Luo , Xiaoxue Wang , Rong Yang , Junjie Zhao","doi":"10.1016/j.progpolymsci.2023.101688","DOIUrl":null,"url":null,"abstract":"<div><p><span><span><span>Patterned polymer thin films are essential components in many devices and applications owing to the multi-functionality, flexibility, lightweight and cost-efficiency. Unfortunately, conventional </span>photolithography needs the use of developers and strippers which contain solvents and reagents that may dissolve, swell or degrade the polymer thin film substrates. Alternatively, non-photolithographic strategies provide alternative options and avoid the complicated optical systems, offering versatile routes for fabricating polymeric micro- and </span>nanostructures<span>. In this review, we summarize the recent progress in non-photolithographic patterning methods including soft lithography<span>, nanoimprint lithography, direct writing, self-assembly of </span></span></span>block copolymers<span>, area-selective vapor phase deposition and instability induced patterning. These patterning approaches have been applied to various applications such as chromic devices, polymer light-emitting diodes, sensors, transistors, and protein and cellular engineering and many other scenarios. Finally, the subsisting challenges and future research directions of non-photolithographic patterning approaches are highlighted from the aspect of resolution, reliability and scalability.</span></p></div>","PeriodicalId":413,"journal":{"name":"Progress in Polymer Science","volume":"142 ","pages":"Article 101688"},"PeriodicalIF":26.0000,"publicationDate":"2023-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Recent progress in non-photolithographic patterning of polymer thin films\",\"authors\":\"Mingjun Qiu , Weiwei Du , Shangyu Zhou , Pengzhe Cai , Yingwu Luo , Xiaoxue Wang , Rong Yang , Junjie Zhao\",\"doi\":\"10.1016/j.progpolymsci.2023.101688\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span><span><span>Patterned polymer thin films are essential components in many devices and applications owing to the multi-functionality, flexibility, lightweight and cost-efficiency. Unfortunately, conventional </span>photolithography needs the use of developers and strippers which contain solvents and reagents that may dissolve, swell or degrade the polymer thin film substrates. Alternatively, non-photolithographic strategies provide alternative options and avoid the complicated optical systems, offering versatile routes for fabricating polymeric micro- and </span>nanostructures<span>. In this review, we summarize the recent progress in non-photolithographic patterning methods including soft lithography<span>, nanoimprint lithography, direct writing, self-assembly of </span></span></span>block copolymers<span>, area-selective vapor phase deposition and instability induced patterning. These patterning approaches have been applied to various applications such as chromic devices, polymer light-emitting diodes, sensors, transistors, and protein and cellular engineering and many other scenarios. Finally, the subsisting challenges and future research directions of non-photolithographic patterning approaches are highlighted from the aspect of resolution, reliability and scalability.</span></p></div>\",\"PeriodicalId\":413,\"journal\":{\"name\":\"Progress in Polymer Science\",\"volume\":\"142 \",\"pages\":\"Article 101688\"},\"PeriodicalIF\":26.0000,\"publicationDate\":\"2023-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Progress in Polymer Science\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0079670023000436\",\"RegionNum\":1,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"POLYMER SCIENCE\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Progress in Polymer Science","FirstCategoryId":"92","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0079670023000436","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"POLYMER SCIENCE","Score":null,"Total":0}
Recent progress in non-photolithographic patterning of polymer thin films
Patterned polymer thin films are essential components in many devices and applications owing to the multi-functionality, flexibility, lightweight and cost-efficiency. Unfortunately, conventional photolithography needs the use of developers and strippers which contain solvents and reagents that may dissolve, swell or degrade the polymer thin film substrates. Alternatively, non-photolithographic strategies provide alternative options and avoid the complicated optical systems, offering versatile routes for fabricating polymeric micro- and nanostructures. In this review, we summarize the recent progress in non-photolithographic patterning methods including soft lithography, nanoimprint lithography, direct writing, self-assembly of block copolymers, area-selective vapor phase deposition and instability induced patterning. These patterning approaches have been applied to various applications such as chromic devices, polymer light-emitting diodes, sensors, transistors, and protein and cellular engineering and many other scenarios. Finally, the subsisting challenges and future research directions of non-photolithographic patterning approaches are highlighted from the aspect of resolution, reliability and scalability.
期刊介绍:
Progress in Polymer Science is a journal that publishes state-of-the-art overview articles in the field of polymer science and engineering. These articles are written by internationally recognized authorities in the discipline, making it a valuable resource for staying up-to-date with the latest developments in this rapidly growing field.
The journal serves as a link between original articles, innovations published in patents, and the most current knowledge of technology. It covers a wide range of topics within the traditional fields of polymer science, including chemistry, physics, and engineering involving polymers. Additionally, it explores interdisciplinary developing fields such as functional and specialty polymers, biomaterials, polymers in drug delivery, polymers in electronic applications, composites, conducting polymers, liquid crystalline materials, and the interphases between polymers and ceramics. The journal also highlights new fabrication techniques that are making significant contributions to the field.
The subject areas covered by Progress in Polymer Science include biomaterials, materials chemistry, organic chemistry, polymers and plastics, surfaces, coatings and films, and nanotechnology. The journal is indexed and abstracted in various databases, including Materials Science Citation Index, Chemical Abstracts, Engineering Index, Current Contents, FIZ Karlsruhe, Scopus, and INSPEC.