MBE制备的低阈值inas带间级联激光器

IF 2 4区 材料科学 Q3 CRYSTALLOGRAPHY
Kedong Zhang , Yuzhe Lin , Wanhua Zheng , Rui Q. Yang , Hong Lu , Yan-Feng Chen
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引用次数: 2

摘要

采用分子束外延(MBE)技术,在InAs衬底上生长了4 ~ 5 μm波段室温发射的中红外带间级联激光器(ICL)结构。x射线衍射证实了外延结构的高结晶质量,厚度与设计的偏差小于1%。平均表面缺陷密度在10 ~ 4级之间。由mbe生长的ICL晶圆制成的广域(BA)器件可以在高达257 K的温度下以连续波(CW)模式在3.5至4.8 μm的波长范围内进行激光,这是在类似波长下基于BA inas的ICL中报道的最高水平。它们的阈值电流密度很低(例如在80 K时2.7 A/cm2),表明材料质量优异,具有非常低的肖克利-里德-霍尔复合。在脉冲模式下,在300 K时,最低阈值电流密度为252 A/cm2,最高工作温度达到379 K。通过对多个mbe生长的ICL晶圆器件性能的比较,证明了光束等效压力稳定性和层厚精确控制对于理想性能的重要性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Low threshold InAs-based interband cascade lasers grown by MBE

Mid-infrared interband cascade laser (ICL) structures aimed for emission at room temperature in the 4–5 μm wavelength region are grown by molecular beam epitaxy (MBE) on InAs substrates. High crystalline quality of the epitaxial structures has been confirmed by X-ray diffraction with thickness deviations less than 1% from the designs. Also, the average surface defect density is in the low ten to the fourth level. The broad-area (BA) devices made from the MBE-grown ICL wafers can lase in continuous wave (CW) mode in a wavelength range from 3.5 to 4.8 μm at temperatures up to 257 K, which is the highest reported for BA InAs-based ICLs at similar wavelengths. Their threshold current densities are low (e.g. 2.7 A/cm2 at 80 K), indicating excellent material quality with a very low Shockley-Reed-Hall recombination. In pulsed mode, the lowest threshold current density is 252 A/cm2 at 300 K, and the maximum operating temperature has reached 379 K. By comparisons in device performance among multiple MBE-grown ICL wafers, the importance of beam equivalent pressure stability and accurate control of layer thicknesses is demonstrated for the desirable performance.

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来源期刊
Journal of Crystal Growth
Journal of Crystal Growth 化学-晶体学
CiteScore
3.60
自引率
11.10%
发文量
373
审稿时长
65 days
期刊介绍: The journal offers a common reference and publication source for workers engaged in research on the experimental and theoretical aspects of crystal growth and its applications, e.g. in devices. Experimental and theoretical contributions are published in the following fields: theory of nucleation and growth, molecular kinetics and transport phenomena, crystallization in viscous media such as polymers and glasses; crystal growth of metals, minerals, semiconductors, superconductors, magnetics, inorganic, organic and biological substances in bulk or as thin films; molecular beam epitaxy, chemical vapor deposition, growth of III-V and II-VI and other semiconductors; characterization of single crystals by physical and chemical methods; apparatus, instrumentation and techniques for crystal growth, and purification methods; multilayer heterostructures and their characterisation with an emphasis on crystal growth and epitaxial aspects of electronic materials. A special feature of the journal is the periodic inclusion of proceedings of symposia and conferences on relevant aspects of crystal growth.
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