从微到纳米:微纳米填充聚合物陶瓷复合材料在微系统技术中的性能和潜在应用。

T Hanemann, J Boehm, P Henzi, K Honnef, K Litfin, E Ritzhaupt-Kleissl, J Hausselt
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引用次数: 23

摘要

在微系统技术中,为生成或复制微结构表面建立了四种重要的材料类别:硅、聚合物、金属和陶瓷。与聚合物相比,由聚合物基体和陶瓷填料组成的复合材料表现出更好的热机械性能,可以作为一种新的附加材料类别引入。在复合材料中,纳米陶瓷取代微尺寸的陶瓷填料对复合材料的物理性能有很大的影响:陶瓷颗粒尺寸减小到纳米尺度,由于表面积大,烧结活性得到改善。该方法简化了致密陶瓷的制作,可用于微结构陶瓷零件的快速成型。纳米陶瓷的加入,粒径为
本文章由计算机程序翻译,如有差异,请以英文原文为准。
From micro to nano: properties and potential applications of micro- and nano-filled polymer ceramic composites in microsystem technology.

In microsystem technology, four important material classes are established either for the generation or the replication of microstructured surfaces: silicon, polymers, metals and ceramics. Composite materials consisting of a polymer matrix and ceramic fillers show improved thermomechanical properties in comparison to polymers and can be introduced as a new additional material class. The substitution of micro-sized ceramic fillers by nano-sized ceramics in composites has a strong influence on the composite's physical properties: the reduction of ceramic particle size down to the nanometre scale results in an improved sinter activity owing to the large surface area. The fabrication of dense ceramics is simplified and can be used for a rapid prototyping of microstructured ceramic parts. The addition of nano-sized ceramics with particle sizes of <40 nm to polymers allows the manufacturing of transparent polymer based composites with modified refractive indices for use in polymer waveguides. The influence of the ceramic particle size, the ceramic content and different dispersion methods on the composite's physical properties are discussed.

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