迈向全硅/锗光子平台的锗光子元件

IF 4.5 2区 材料科学 Q1 CRYSTALLOGRAPHY
V. Reboud , A. Gassenq , J.M. Hartmann , J. Widiez , L. Virot , J. Aubin , K. Guilloy , S. Tardif , J.M. Fédéli , N. Pauc , A. Chelnokov , V. Calvo
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引用次数: 53

摘要

最近,锗基材料吸引了很多人的兴趣,因为它们可以克服标准硅光子器件固有的一些限制,并且可以特别用于中红外传感应用。外延生长的本征材料和掺杂材料的质量是达到目标性能的关键。该领域的主要挑战之一仍然是制造与微电子工业兼容的高效iv族激光源,这被视为在Si上集成III-V激光器的复杂性的替代方案。困难来自于iv族半导体带隙必须由间接转变为直接,使用高拉伸应变或通过将锗与锡合金化。本文综述了锗基关键光子元件如波导、光电二极管和调制器的最新进展,并讨论了锗基激光器的最新进展。我们表明,采用Smart Cut™技术制造的新型光学绝缘体上锗(GeOI)衬底是未来硅互补金属氧化物半导体(CMOS)兼容激光演示的关键特征。这一综述暗示了未来基于锗和硅的光子平台。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Germanium based photonic components toward a full silicon/germanium photonic platform

Lately, germanium based materials attract a lot of interest as they can overcome some limits inherent to standard Silicon Photonics devices and can be used notably in Mid-Infra-Red sensing applications. The quality of epitaxially grown intrinsic and doped materials is critical to reach the targeted performances. One of the main challenges in the field remains the fabrication of efficient group-IV laser sources compatible with the microelectronics industry, seen as an alternative to the complexity of integration of III-V lasers on Si. The difficulties come from the fact that the group-IV semiconductor bandgap has to be transformed from indirect to direct, using high tensile strains or by alloying germanium with tin. Here, we review recent progresses on critical germanium-based photonic components such as waveguides, photodiodes and modulators and discuss the latest advances towards germanium-based lasers. We show that novel optical germanium-On-Insulator (GeOI) substrates fabricated by the Smart Cut™ technology is a key feature for future Si - Complementary Metal Oxide Semiconductor (CMOS) - compatible laser demonstration. This review hints at a future photonics platform based on germanium and Silicon.

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来源期刊
Progress in Crystal Growth and Characterization of Materials
Progress in Crystal Growth and Characterization of Materials 工程技术-材料科学:表征与测试
CiteScore
8.80
自引率
2.00%
发文量
10
审稿时长
1 day
期刊介绍: Materials especially crystalline materials provide the foundation of our modern technologically driven world. The domination of materials is achieved through detailed scientific research. Advances in the techniques of growing and assessing ever more perfect crystals of a wide range of materials lie at the roots of much of today''s advanced technology. The evolution and development of crystalline materials involves research by dedicated scientists in academia as well as industry involving a broad field of disciplines including biology, chemistry, physics, material sciences and engineering. Crucially important applications in information technology, photonics, energy storage and harvesting, environmental protection, medicine and food production require a deep understanding of and control of crystal growth. This can involve suitable growth methods and material characterization from the bulk down to the nano-scale.
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