{"title":"基于通用微光刻策略的超集成适形有机晶体管。","authors":"Yanping Ni,Xiaoli Zhao,Chuang Xue,Jing Sun,Fanjunjie Han,Junru Zhang,Pengbo Xi,Yanhong Tong,Qingxin Tang,Yichun Liu","doi":"10.1038/s41467-025-64284-3","DOIUrl":null,"url":null,"abstract":"Conformable organic thin-film transistors (OTFTs) are identified as a core electronic component for next-generation wearable and implantable electronics. However, the lack of high-level integration of high-performance conformable devices remains a major obstacle to the commercialization of organic transistors. Here, a universal and non-destructive dual protective layer photolithography strategy is proposed, which is compatible with all organic materials, including conductors, semiconductors and insulators, with pattern precision of 0.5 µm. This approach enables the fabrication of ultrahigh-density OTFTs that demonstrate a mobility of 2.21 cm2V-1s-1 at a density of 64,288 transistors/cm2, scalable to scaled up to 5,120,000 transistors/cm2 while maintaining a mobility of ~1 cm2V-1s-1. Moreover, the devices show remarkable stability (10,000 switching cycles/100,000 folding cycles) and have been successfully integrated into sub-micron circuits and flexible displays, demonstrating strong application potential. This work offers a universal wafer-level manufacturing and integration pathway for ultrahigh-density, high-performance conformable devices, advancing the industrialization of conformable electronics.","PeriodicalId":19066,"journal":{"name":"Nature Communications","volume":"1 1","pages":"9246"},"PeriodicalIF":15.7000,"publicationDate":"2025-10-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Superintegrated conformable organic transistors based on a universal microlithographic strategy.\",\"authors\":\"Yanping Ni,Xiaoli Zhao,Chuang Xue,Jing Sun,Fanjunjie Han,Junru Zhang,Pengbo Xi,Yanhong Tong,Qingxin Tang,Yichun Liu\",\"doi\":\"10.1038/s41467-025-64284-3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Conformable organic thin-film transistors (OTFTs) are identified as a core electronic component for next-generation wearable and implantable electronics. However, the lack of high-level integration of high-performance conformable devices remains a major obstacle to the commercialization of organic transistors. Here, a universal and non-destructive dual protective layer photolithography strategy is proposed, which is compatible with all organic materials, including conductors, semiconductors and insulators, with pattern precision of 0.5 µm. This approach enables the fabrication of ultrahigh-density OTFTs that demonstrate a mobility of 2.21 cm2V-1s-1 at a density of 64,288 transistors/cm2, scalable to scaled up to 5,120,000 transistors/cm2 while maintaining a mobility of ~1 cm2V-1s-1. Moreover, the devices show remarkable stability (10,000 switching cycles/100,000 folding cycles) and have been successfully integrated into sub-micron circuits and flexible displays, demonstrating strong application potential. This work offers a universal wafer-level manufacturing and integration pathway for ultrahigh-density, high-performance conformable devices, advancing the industrialization of conformable electronics.\",\"PeriodicalId\":19066,\"journal\":{\"name\":\"Nature Communications\",\"volume\":\"1 1\",\"pages\":\"9246\"},\"PeriodicalIF\":15.7000,\"publicationDate\":\"2025-10-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nature Communications\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://doi.org/10.1038/s41467-025-64284-3\",\"RegionNum\":1,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MULTIDISCIPLINARY SCIENCES\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nature Communications","FirstCategoryId":"103","ListUrlMain":"https://doi.org/10.1038/s41467-025-64284-3","RegionNum":1,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MULTIDISCIPLINARY SCIENCES","Score":null,"Total":0}
Superintegrated conformable organic transistors based on a universal microlithographic strategy.
Conformable organic thin-film transistors (OTFTs) are identified as a core electronic component for next-generation wearable and implantable electronics. However, the lack of high-level integration of high-performance conformable devices remains a major obstacle to the commercialization of organic transistors. Here, a universal and non-destructive dual protective layer photolithography strategy is proposed, which is compatible with all organic materials, including conductors, semiconductors and insulators, with pattern precision of 0.5 µm. This approach enables the fabrication of ultrahigh-density OTFTs that demonstrate a mobility of 2.21 cm2V-1s-1 at a density of 64,288 transistors/cm2, scalable to scaled up to 5,120,000 transistors/cm2 while maintaining a mobility of ~1 cm2V-1s-1. Moreover, the devices show remarkable stability (10,000 switching cycles/100,000 folding cycles) and have been successfully integrated into sub-micron circuits and flexible displays, demonstrating strong application potential. This work offers a universal wafer-level manufacturing and integration pathway for ultrahigh-density, high-performance conformable devices, advancing the industrialization of conformable electronics.
期刊介绍:
Nature Communications, an open-access journal, publishes high-quality research spanning all areas of the natural sciences. Papers featured in the journal showcase significant advances relevant to specialists in each respective field. With a 2-year impact factor of 16.6 (2022) and a median time of 8 days from submission to the first editorial decision, Nature Communications is committed to rapid dissemination of research findings. As a multidisciplinary journal, it welcomes contributions from biological, health, physical, chemical, Earth, social, mathematical, applied, and engineering sciences, aiming to highlight important breakthroughs within each domain.