Ting-yu Ren, Hong-jian Zhao, Hai-xiao Fang, Ji-ning He
{"title":"调制周期对TiSiN-Ag/TiN多层涂层组织和性能的影响","authors":"Ting-yu Ren, Hong-jian Zhao, Hai-xiao Fang, Ji-ning He","doi":"10.1007/s11665-025-11643-2","DOIUrl":null,"url":null,"abstract":"<div><p>In this study, the TiSiN-Ag composite coating and TiSiN-Ag/TiN multilayer nanostructured coatings with varying modulation periods were deposited using magnetron sputtering technology. The microstructure and tribological behavior of the TiSiN-Ag/TiN multilayer coatings depending on modulation periods were investigated. The results revealed that the TiSiN-Ag coating and TiSiN-Ag/TiN multilayer coatings consisted of TiN phases, Ag phases, and amorphous SiNx phases. The TiSiN-Ag(15 nm)/TiN(15 nm) multilayer coating exhibited the highest hardness (9.86 ± 1.15 GPa), the resistance to elastic strain failure (0.0556) and plastic strain to failure (0.0304 GPa), as well as the lowest elastic modulus (177.43 ± 5.46 GPa). Additionally, it also demonstrated the lower friction coefficient (0.55 ± 0.056) and wear rate (3.164 × 10<sup>-5</sup> mm<sup>3</sup>/(N·m)). The multilayer design of the TiSiN-Ag coatings significantly improved its wear resistance. The wear track morphology indicate that the wear mechanisms of the TiSiN-Ag and TiSiN-Ag/TiN multilayer coatings mainly include adhesive and oxidative wear.</p></div>","PeriodicalId":644,"journal":{"name":"Journal of Materials Engineering and Performance","volume":"34 20","pages":"22883 - 22892"},"PeriodicalIF":2.0000,"publicationDate":"2025-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of Modulation Period on Microstructure and Properties of TiSiN-Ag/TiN Multilayer Coatings\",\"authors\":\"Ting-yu Ren, Hong-jian Zhao, Hai-xiao Fang, Ji-ning He\",\"doi\":\"10.1007/s11665-025-11643-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this study, the TiSiN-Ag composite coating and TiSiN-Ag/TiN multilayer nanostructured coatings with varying modulation periods were deposited using magnetron sputtering technology. The microstructure and tribological behavior of the TiSiN-Ag/TiN multilayer coatings depending on modulation periods were investigated. The results revealed that the TiSiN-Ag coating and TiSiN-Ag/TiN multilayer coatings consisted of TiN phases, Ag phases, and amorphous SiNx phases. The TiSiN-Ag(15 nm)/TiN(15 nm) multilayer coating exhibited the highest hardness (9.86 ± 1.15 GPa), the resistance to elastic strain failure (0.0556) and plastic strain to failure (0.0304 GPa), as well as the lowest elastic modulus (177.43 ± 5.46 GPa). Additionally, it also demonstrated the lower friction coefficient (0.55 ± 0.056) and wear rate (3.164 × 10<sup>-5</sup> mm<sup>3</sup>/(N·m)). The multilayer design of the TiSiN-Ag coatings significantly improved its wear resistance. The wear track morphology indicate that the wear mechanisms of the TiSiN-Ag and TiSiN-Ag/TiN multilayer coatings mainly include adhesive and oxidative wear.</p></div>\",\"PeriodicalId\":644,\"journal\":{\"name\":\"Journal of Materials Engineering and Performance\",\"volume\":\"34 20\",\"pages\":\"22883 - 22892\"},\"PeriodicalIF\":2.0000,\"publicationDate\":\"2025-07-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Materials Engineering and Performance\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11665-025-11643-2\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Materials Engineering and Performance","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1007/s11665-025-11643-2","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Influence of Modulation Period on Microstructure and Properties of TiSiN-Ag/TiN Multilayer Coatings
In this study, the TiSiN-Ag composite coating and TiSiN-Ag/TiN multilayer nanostructured coatings with varying modulation periods were deposited using magnetron sputtering technology. The microstructure and tribological behavior of the TiSiN-Ag/TiN multilayer coatings depending on modulation periods were investigated. The results revealed that the TiSiN-Ag coating and TiSiN-Ag/TiN multilayer coatings consisted of TiN phases, Ag phases, and amorphous SiNx phases. The TiSiN-Ag(15 nm)/TiN(15 nm) multilayer coating exhibited the highest hardness (9.86 ± 1.15 GPa), the resistance to elastic strain failure (0.0556) and plastic strain to failure (0.0304 GPa), as well as the lowest elastic modulus (177.43 ± 5.46 GPa). Additionally, it also demonstrated the lower friction coefficient (0.55 ± 0.056) and wear rate (3.164 × 10-5 mm3/(N·m)). The multilayer design of the TiSiN-Ag coatings significantly improved its wear resistance. The wear track morphology indicate that the wear mechanisms of the TiSiN-Ag and TiSiN-Ag/TiN multilayer coatings mainly include adhesive and oxidative wear.
期刊介绍：
ASM International''s Journal of Materials Engineering and Performance focuses on solving day-to-day engineering challenges, particularly those involving components for larger systems. The journal presents a clear understanding of relationships between materials selection, processing, applications and performance.
The Journal of Materials Engineering covers all aspects of materials selection, design, processing, characterization and evaluation, including how to improve materials properties through processes and process control of casting, forming, heat treating, surface modification and coating, and fabrication.
Testing and characterization (including mechanical and physical tests, NDE, metallography, failure analysis, corrosion resistance, chemical analysis, surface characterization, and microanalysis of surfaces, features and fractures), and industrial performance measurement are also covered
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