用于近红外(NIR)探测的超高性能Si0.5Ge0.5源异质介质TFET光敏传感器

IF 3 Q2 PHYSICS, CONDENSED MATTER
Chandaboina Pavan Kumar, Manish Kumar Singh
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The <span><math><mrow><msub><mrow><mi>Si</mi></mrow><mrow><mn>0</mn><mo>.</mo><mn>5</mn></mrow></msub><msub><mrow><mi>Ge</mi></mrow><mrow><mn>0</mn><mo>.</mo><mn>5</mn></mrow></msub></mrow></math></span> source HD-TFET photosensor incorporates a heterogate configuration with stacked dielectric layers <span><math><mrow><msub><mrow><mi>HfO</mi></mrow><mrow><mn>2</mn></mrow></msub><mo>/</mo><msub><mrow><mi>SiO</mi></mrow><mrow><mn>2</mn></mrow></msub></mrow></math></span> beneath a silicon photosensing gate <span><math><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> and employs a <span><math><msup><mrow><mi>p</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> <span><math><mrow><msub><mrow><mi>Si</mi></mrow><mrow><mn>0</mn><mo>.</mo><mn>5</mn></mrow></msub><msub><mrow><mi>Ge</mi></mrow><mrow><mn>0</mn><mo>.</mo><mn>5</mn></mrow></msub></mrow></math></span> source, a <span><math><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span> silicon drain to improve carrier tunneling. 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引用次数: 0

摘要

本文研究了Si0.5Ge0.5源异质介质(HD) TFET光传感器在近红外(NIR) 750 ~ 1050 nm范围内的光学性能。Si0.5Ge0.5源hd - ttfet光敏传感器采用异质门结构,在硅光敏栅极n+下堆叠介质层HfO2/SiO2,并采用p+ Si0.5Ge0.5源,n+硅漏极来改善载流子隧穿。通过评估关键物理参数,包括能带对准、光产生率、带对带隧穿率和电子密度分布,分析了在光照和黑暗条件下的光响应。灵敏度、光谱灵敏度(Sn)、信噪比(SNR)、响应度(R)、外量子效率(η)和探测率(D)基于入射光波长(λ)和栅极电压(Vgs)进行评估。仿真结果表明,与传统的si基和ge源TFET光传感器相比,Si0.5Ge0.5源HD-TFET光传感器具有优越的光学性能,特别是在低光和近红外条件下。这是由于异质结构提高了BTBT速率和光生载流子的有效传输。对Si0.5Ge0.5源HD-TFET光传感器的性能指标进行了编制和比较,结果表明Si0.5Ge0.5源HD-TFET光传感器具有55.35的高光谱灵敏度、1.6×105 A/W的响应率、1.76×105的外量子效率和更高的灵敏度,表明该技术在低功耗光探测应用中具有广阔的前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultra-high performance Si0.5Ge0.5 source Hetero-Dielectric TFET photosensor for near-infrared (NIR) detection
This work investigates the optical performance of a Si0.5Ge0.5 source Hetero-Dielectric (HD) TFET photosensor for detection of light in the near-infrared (NIR) region 750 to 1050 nm. The Si0.5Ge0.5 source HD-TFET photosensor incorporates a heterogate configuration with stacked dielectric layers HfO2/SiO2 beneath a silicon photosensing gate n+ and employs a p+ Si0.5Ge0.5 source, a n+ silicon drain to improve carrier tunneling. The optical response is analyzed under both illuminated and dark conditions by evaluating key physical parameters, including energy band alignment, optical generation rate, band-to-band tunneling (BTBT) rate, and electron density distribution. Sensitivity, Spectral sensitivity (Sn), signal-to-noise ratio (SNR), responsivity (R), external quantum efficiency (η), and detectivity (D), are evaluated based on incident light wavelength (λ) and gate voltage (Vgs). Simulation results demonstrate that the Si0.5Ge0.5 source HD-TFET photosensor achieves superior optical performance, particularly under low-light and NIR conditions, compared to conventional Si-based and Ge-source TFET photosensors. This is attributed to the enhanced BTBT rate and efficient transport of photogenerated carriers enabled by the heterogate structure. Performance metrics are compiled and compared, highlighting the effectiveness of the Si0.5Ge0.5 source HD-TFET photosensor in delivering high spectral sensitivity of 55.35, responsivity of 1.6×105 A/W, external quantum efficiency of 1.76×105, and enhanced sensitivity, indicating that it is a promising technology for low-power photodetection applications.
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