低压射频等离子体中的离子电流密度和鞘层动力学：细胞内粒子模拟和分析计算的比较研究

IF 2.1 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Electrostatics Pub Date : 2025-10-09 DOI:10.1016/j.elstat.2025.104194

M. Rahmani , N. Akhlaghipour , J. Taghinejad , A.R. Niknam

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引用次数: 0

摘要

采用粒子池（PIC）模拟和分析计算相结合的方法研究了低压射频放电中等离子体鞘层的时空演化。在多个空间位置分析了射频电压频率、振幅和初始等离子体密度对鞘层宽度、离子电流密度和粒子分布的影响。结果表明，由于空间电荷效应的增加，较高的射频频率显著提高了离子电流密度。此外，峰值离子电流密度的空间映射显示了对射频电压参数的强烈依赖。对离子电流在接地电极和通电电极上的时间行为进行了表征。

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Ion current density and sheath dynamics in low-pressure RF plasmas: A comparative study of particle-in-cell simulations and analytical calculations

The spatiotemporal evolution of plasma sheaths in low-pressure RF discharges is studied using particle-in-cell (PIC) simulations in conjunction with analytical calculations. The effects of RF voltage frequency, amplitude, and initial plasma density on sheath width, ion current density, and particle distributions are analyzed at multiple spatial locations over time. The results indicate that higher RF frequencies significantly enhance the ion current density due to increased space charge effects. Additionally, spatial mapping of peak ion current density demonstrates a strong dependence on RF voltage parameters. The temporal behavior of the ion current at both grounded and powered electrodes is characterized.

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来源期刊

Journal of Electrostatics 工程技术-工程：电子与电气

CiteScore

4.00

自引率

11.10%

发文量

审稿时长

49 days

期刊介绍： The Journal of Electrostatics is the leading forum for publishing research findings that advance knowledge in the field of electrostatics. We invite submissions in the following areas: Electrostatic charge separation processes. Electrostatic manipulation of particles, droplets, and biological cells. Electrostatically driven or controlled fluid flow. Electrostatics in the gas phase.