激光和生长速率对常规和激光辅助MOCVD GaN中陷阱形成的影响

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-10-07 DOI:10.1063/5.0276417

Wenbo Li, Yuxuan Zhang, Vijay Gopal Thirupakuzi Vangipuram, Hongping Zhao, Steven A. Ringel, Aaron R. Arehart

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引用次数: 0

摘要

系统的深能级瞬态光谱和光学光谱研究揭示了陷阱浓度与金属有机化学气相沉积（MOCVD） GaN生长速率之间的关系。EC-0.57、EC-0.72和EC-0.9 eV陷阱通常对生长速率不敏感，而c相关的EC-1.35和EC-3.28 eV陷阱以及VGa和/或c相关的EC-2.6 eV陷阱随生长速率单调增加。在高生长速率MOCVD GaN中，C/ vga相关陷阱也负责掺杂补偿。激光辅助MOCVD显示出抑制陷阱形成而不牺牲高生长速率的潜力，为未来厚垂直GaN的应用铺平了道路。

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The impact of laser and growth rate on trap formation in conventional and laser-assisted MOCVD GaN

A systematic deep-level transient and optical spectroscopy study indicated the relationship between trap concentrations and the growth rate of metal–organic chemical vapor deposition (MOCVD) GaN. The EC-0.57, EC-0.72, and EC-0.9 eV traps were generally insensitive to the growth rate, while the C-related EC-1.35 and EC-3.28 eV traps and the VGa- and/or C-related EC-2.6 eV trap increased monotonically over the growth rate. The C/VGa-related traps are also responsible for the doping compensation in high-growth-rate MOCVD GaN. The laser-assisted MOCVD displayed potential in suppressing trap formation without sacrificing the high growth rate, paving the way for future thick vertical GaN applications.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.