{"title":"基于环形AlMn合金薄膜的x射线TES探测器的制备与表征","authors":"Yifei Zhang, Zhengwei Li, Mengxian Zhang, Guofu Liao, Zhouhui Liu, Yu Xu, Nan Li, Liangpeng Xie, Junjie Zhou, Xufang Li, He Gao, Shibo Shu, Yongping Li, Yudong Gu, Daikang Yan, Xuefeng Lu, Hua Feng, Yongjie Zhang, Congzhan Liu","doi":"10.1007/s10909-025-03332-0","DOIUrl":null,"url":null,"abstract":"<div><p>AlMn alloy films are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn films are developed. The fabrication processes of TES detectors are introduced in detail. The characteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The discrepancy is mainly attributed to the larger readout electronics noise than expected.</p></div>","PeriodicalId":641,"journal":{"name":"Journal of Low Temperature Physics","volume":"221 1-6","pages":"307 - 319"},"PeriodicalIF":1.4000,"publicationDate":"2025-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication and Characterization of X-ray TES Detectors Based on Annular AlMn Alloy Films\",\"authors\":\"Yifei Zhang, Zhengwei Li, Mengxian Zhang, Guofu Liao, Zhouhui Liu, Yu Xu, Nan Li, Liangpeng Xie, Junjie Zhou, Xufang Li, He Gao, Shibo Shu, Yongping Li, Yudong Gu, Daikang Yan, Xuefeng Lu, Hua Feng, Yongjie Zhang, Congzhan Liu\",\"doi\":\"10.1007/s10909-025-03332-0\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>AlMn alloy films are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn films are developed. The fabrication processes of TES detectors are introduced in detail. The characteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The discrepancy is mainly attributed to the larger readout electronics noise than expected.</p></div>\",\"PeriodicalId\":641,\"journal\":{\"name\":\"Journal of Low Temperature Physics\",\"volume\":\"221 1-6\",\"pages\":\"307 - 319\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2025-09-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Low Temperature Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s10909-025-03332-0\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Low Temperature Physics","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s10909-025-03332-0","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0
摘要
AlMn合金薄膜广泛应用于宇宙微波背景辐射的超导跃迁边缘传感器（TESs）中。然而，基于AlMn TES在x射线或伽马射线检测中的应用鲜有报道。在这项研究中，开发了基于独特的环形AlMn薄膜的x射线TES探测器。详细介绍了TES探测器的制作工艺。在稀释冰箱中评估了三种TES样品的特性。结果表明，三种环形TES探测器的I-V特性高度一致。吸收体最小的TES探测器获得的最佳能量分辨率为11.0 eV @ 5.9 keV，低于理论值。这种差异主要归因于比预期更大的读出电子噪声。
Fabrication and Characterization of X-ray TES Detectors Based on Annular AlMn Alloy Films
AlMn alloy films are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn films are developed. The fabrication processes of TES detectors are introduced in detail. The characteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The discrepancy is mainly attributed to the larger readout electronics noise than expected.
期刊介绍：
The Journal of Low Temperature Physics publishes original papers and review articles on all areas of low temperature physics and cryogenics, including theoretical and experimental contributions. Subject areas include: Quantum solids, liquids and gases; Superfluidity; Superconductivity; Condensed matter physics; Experimental techniques; The Journal encourages the submission of Rapid Communications and Special Issues.
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