Wenzhen Li , Xuankai Xu , Jiawei Li , Peng Dong , Yiyao Zhu , Jun Li , Xufeng Kou , Tao Wu
{"title":"NbN超导电极对lamb波型AlScN压电MEMS谐振器低温特性的影响","authors":"Wenzhen Li , Xuankai Xu , Jiawei Li , Peng Dong , Yiyao Zhu , Jun Li , Xufeng Kou , Tao Wu","doi":"10.1016/j.sna.2025.117089","DOIUrl":null,"url":null,"abstract":"<div><div>In this work, we propose a S<sub>0</sub> mode Lamb wave resonator (LWR) on the Al<sub>0.7</sub>Sc<sub>0.3</sub>N platform, utilizing niobium nitride (NbN) as a superconducting electrode to replace traditional metal electrodes. Using the zero-resistivity characteristic of NbN at its critical temperature, we effectively reduce electrode loss in a cryogenic environment. Resonators with identical designs were fabricated using NbN and aluminum (Al) as electrode materials, respectively, and tested at temperatures as low as 4 K. The experimental results were fitted using a specially adapted modified Butterworth-Van Dyke (MBVD) model to analyze performance variations with temperature. Compared to the Al-based resonators, the NbN-based devices demonstrated superior cryogenic performance, achieving a quality factor (<em>Q</em>) of 1524, which is 7.29 times higher than at room temperature, and a figure-of-merit (FoM = <em>Q</em> × <em>k</em><sub><em>t</em></sub><sup>2</sup>) of 57.89, a 5.76-fold improvement. This study highlights the advantages of NbN electrodes over Al electrodes in cryogenic environments and provides a novel design approach for acoustic resonators in qubit systems, showcasing their potential for next-generation hybrid quantum networks.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"395 ","pages":"Article 117089"},"PeriodicalIF":4.9000,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effects of NbN superconducting electrodes on the cryogenic characteristics of lamb wave mode AlScN piezoelectric MEMS resonators\",\"authors\":\"Wenzhen Li , Xuankai Xu , Jiawei Li , Peng Dong , Yiyao Zhu , Jun Li , Xufeng Kou , Tao Wu\",\"doi\":\"10.1016/j.sna.2025.117089\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In this work, we propose a S<sub>0</sub> mode Lamb wave resonator (LWR) on the Al<sub>0.7</sub>Sc<sub>0.3</sub>N platform, utilizing niobium nitride (NbN) as a superconducting electrode to replace traditional metal electrodes. Using the zero-resistivity characteristic of NbN at its critical temperature, we effectively reduce electrode loss in a cryogenic environment. Resonators with identical designs were fabricated using NbN and aluminum (Al) as electrode materials, respectively, and tested at temperatures as low as 4 K. The experimental results were fitted using a specially adapted modified Butterworth-Van Dyke (MBVD) model to analyze performance variations with temperature. Compared to the Al-based resonators, the NbN-based devices demonstrated superior cryogenic performance, achieving a quality factor (<em>Q</em>) of 1524, which is 7.29 times higher than at room temperature, and a figure-of-merit (FoM = <em>Q</em> × <em>k</em><sub><em>t</em></sub><sup>2</sup>) of 57.89, a 5.76-fold improvement. This study highlights the advantages of NbN electrodes over Al electrodes in cryogenic environments and provides a novel design approach for acoustic resonators in qubit systems, showcasing their potential for next-generation hybrid quantum networks.</div></div>\",\"PeriodicalId\":21689,\"journal\":{\"name\":\"Sensors and Actuators A-physical\",\"volume\":\"395 \",\"pages\":\"Article 117089\"},\"PeriodicalIF\":4.9000,\"publicationDate\":\"2025-09-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators A-physical\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0924424725008957\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725008957","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Effects of NbN superconducting electrodes on the cryogenic characteristics of lamb wave mode AlScN piezoelectric MEMS resonators
In this work, we propose a S0 mode Lamb wave resonator (LWR) on the Al0.7Sc0.3N platform, utilizing niobium nitride (NbN) as a superconducting electrode to replace traditional metal electrodes. Using the zero-resistivity characteristic of NbN at its critical temperature, we effectively reduce electrode loss in a cryogenic environment. Resonators with identical designs were fabricated using NbN and aluminum (Al) as electrode materials, respectively, and tested at temperatures as low as 4 K. The experimental results were fitted using a specially adapted modified Butterworth-Van Dyke (MBVD) model to analyze performance variations with temperature. Compared to the Al-based resonators, the NbN-based devices demonstrated superior cryogenic performance, achieving a quality factor (Q) of 1524, which is 7.29 times higher than at room temperature, and a figure-of-merit (FoM = Q × kt2) of 57.89, a 5.76-fold improvement. This study highlights the advantages of NbN electrodes over Al electrodes in cryogenic environments and provides a novel design approach for acoustic resonators in qubit systems, showcasing their potential for next-generation hybrid quantum networks.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...