单晶铜加工丝的应变诱导再结晶行为:微量Y对室温下力学性能演变的作用

IF 7 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Shaolin Li , Chenyang Ge , Kexing Song , Xiuhua Guo , Yanjun Zhou , Yahui Liu , Haitao Liu , Chaomin Zhang , Jun Cao , Fei Cao , Junjie Sun , Hailin Jing
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引用次数: 0

摘要

单晶铜加工线作为集成电路中传输线的关键导电材料,由于其优越的塑性变形能力,在超精细加工中起着至关重要的作用。本研究研究了稀土元素Y在高应变条件下单晶铜加工线材的塑性变形演变和显微组织变化,系统研究了稀土元素Y对单晶铜加工线材的力学性能、显微组织发展和织构组成的影响。研究采用扫描电子显微镜(SEM)、电子背散射衍射(EBSD)、x射线衍射(XRD)、三维原子探针层析成像(3D-APT)和透射电子显微镜(TEM)对材料进行分析和表征。建立了Y-O原子相互吸引模型来分析纳米级析出相。结果表明:ε≥3.68时形成“Y-O″”相,并伴有“自退火”现象;在室温塑性变形过程中,Cu-0.03Y加工线材的抗拉强度(291.73 MPa)比单晶铜加工线材(0.675%)降低35.4%,伸长率(5.75%)提高751%。微合金单晶铜加工丝中纳米级Y2O3和微米级Cu5Y等多尺度析出相的存在导致了显著的晶格畸变,提高了累计位错密度。高的位错密度有利于位错重组、亚晶旋转和lagb向HAGBs的转变,从而增加了<;100>;和<;110>;纤维织构的体积分数,促进了再结晶。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Strain-induced recrystallization behavior in single-crystal copper processing wires: The role of trace Y on mechanical property evolution at room temperature
Single-crystal copper processing wire as a critical conductive material for transmission wires in integrated circuits, plays an essential role in ultra-fine processing due to its superior plastic deformation capability. This study investigates the evolution of plastic deformation and microstructural changes in single-crystal copper processing wire under high strain conditions with the addition of the rare earth element Y. Furthermore, the influence of the rare earth element Y on the mechanical properties, microstructure development, and texture composition of single-crystal copper processing wire is systematically examined. The study employed scanning electron microscopy (SEM), electron backscatter diffraction (EBSD), X-ray diffraction (XRD), three-dimensional atom probe tomography (3D-APT), and transmission electron microscopy (TEM) for material analysis and characterization. A Y-O atomic mutual attraction model was developed to analyze the nanoscale precipitated phases. The results indicate that a “Y-O″ phase forms at ε ≥ 3.68, accompanied by a “self-annealing” phenomenon. Specifically, during room temperature plastic deformation, the tensile strength of Cu-0.03Y processing wire (291.73 MPa) decreases by 35.4 %, while its elongation(5.75 %) increases by 751 % compared to that of single-crystal copper processing wire (0.675 %). The presence of multi-scale precipitates, including nanoscale Y2O3 and micron-scale Cu5Y precipitates, in micro-alloyed single-crystal copper processing wires induces significant lattice distortion and enhances the cumulative dislocation density. The high dislocation density facilitates dislocation reorganization, subgrain rotation, and the transition from LAGBs to HAGBs, thereby increasing the volume fraction of <100> and <110> fiber textures and promoting recrystallization.
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来源期刊
Materials Science and Engineering: A
Materials Science and Engineering: A 工程技术-材料科学:综合
CiteScore
11.50
自引率
15.60%
发文量
1811
审稿时长
31 days
期刊介绍: Materials Science and Engineering A provides an international medium for the publication of theoretical and experimental studies related to the load-bearing capacity of materials as influenced by their basic properties, processing history, microstructure and operating environment. Appropriate submissions to Materials Science and Engineering A should include scientific and/or engineering factors which affect the microstructure - strength relationships of materials and report the changes to mechanical behavior.
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