多孔氮化镓制备技术的进展:方法和应用综述

IF 2.8 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Yuganesini Naidu Siva Kumar, Rahil Izzati Mohd Asri, Muhammad Ramzan, Sabah M. Mohammad, Dian Alwani Zainuri, Mundzir Abdullah
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引用次数: 0

摘要

氮化镓(GaN)以其卓越的材料特性而闻名,支持高效光电和高性能功率器件的设计。然而,它的广泛应用仍然面临瓶颈,包括由于全内反射引起的光提取不良,晶格和热不匹配引起的应变积累以及缺陷引起的性能下降。GaN中的孔隙结构可以通过增强光外耦合、适应外延生长过程中的应变松弛、提供量子约束和改进的热管理来解决这些挑战。本文综述了湿法蚀刻方法的进展,特别是电化学(EC)、金属辅助化学蚀刻(MacEtch)和光电化学(PEC)蚀刻用于定制多孔氮化镓的形貌。分析了掺杂水平、应用偏压、电解质浓度和照明条件之间复杂的相互作用,以阐明它们对孔径分布、均匀性和由此产生的光学行为的影响。这项工作的一个重要贡献是提出了一个系统的、特定于形态的框架,该框架优化了PEC蚀刻参数,以实现目标多孔结构,解决了研究中缺乏标准化协议的问题。此外,本文还强调了未解决的挑战,如意外孔隙、表面氧化和蚀刻后污染,并总结了迄今为止报道的缓解策略。通过将这些见解定位在新兴应用的更广泛背景下,包括先进的光源、传感器、能源设备和生物界面,本综述强调了多孔GaN在受控、优化条件下制造的多用途潜力。最终,这项工作旨在指导未来更可靠、可扩展和特定应用的多孔GaN技术的努力,这些技术可以更好地利用这种材料平台的独特优势,用于下一代光子和纳米电子系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advances in fabrication techniques for porous GaN: a review of methods and applications

Gallium nitride (GaN) is recognized for its exceptional material properties that support the design of both high-efficiency optoelectronic and high-performance power devices. Yet, its widespread application still faces bottlenecks, including poor light extraction due to total internal reflection, strain accumulation from lattice and thermal mismatches, and defect-induced performance degradation. The porosity structures within GaN can tackle these challenges by enhancing light out-coupling, accommodating strain relaxation during epitaxial growth, and providing quantum confinement and improved thermal management. This review discusses the advances in wet etching methods, particularly electrochemical (EC), metal-assisted chemical etching (MacEtch), and photoelectrochemical (PEC) etching for tailoring porous GaN morphologies. The intricate interplay between doping levels, applied bias, electrolyte concentration, and illumination conditions is analyzed to clarify their effects on pore size distribution, uniformity, and resultant optical behavior. A significant contribution of this work is the proposal of a systematic, morphology-specific framework that optimizes PEC etching parameters for achieving targeted porous structures, addressing the lack of standardized protocols across studies. In addition, this paper highlights unresolved challenges such as unintended porosity, surface oxidation, and post-etch contamination, and summarizes mitigation strategies reported to date. By positioning these insights within the broader context of emerging applications, including advanced light emitters, sensors, energy devices, and biointerfaces, this review underscores the versatile potential of porous GaN when fabricated under controlled, well-optimized conditions. Ultimately, this work intends to guide future efforts toward more reliable, scalable, and application-specific porous GaN technologies that can better leverage the unique advantages of this material platform for next-generation photonic and nanoelectronics systems.

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来源期刊
Journal of Materials Science: Materials in Electronics
Journal of Materials Science: Materials in Electronics 工程技术-材料科学:综合
CiteScore
5.00
自引率
7.10%
发文量
1931
审稿时长
2 months
期刊介绍: The Journal of Materials Science: Materials in Electronics is an established refereed companion to the Journal of Materials Science. It publishes papers on materials and their applications in modern electronics, covering the ground between fundamental science, such as semiconductor physics, and work concerned specifically with applications. It explores the growth and preparation of new materials, as well as their processing, fabrication, bonding and encapsulation, together with the reliability, failure analysis, quality assurance and characterization related to the whole range of applications in electronics. The Journal presents papers in newly developing fields such as low dimensional structures and devices, optoelectronics including III-V compounds, glasses and linear/non-linear crystal materials and lasers, high Tc superconductors, conducting polymers, thick film materials and new contact technologies, as well as the established electronics device and circuit materials.
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