{"title":"fabry - p<s:1>微腔法增强ga2o3基MSM-PD的性能。","authors":"Taoan Wang, Xiyao He, Hao Xu, Ruoting Sun, Xiangyu Xu, Kelvin Hongliang Zhang, Hao Long","doi":"10.1364/OL.573765","DOIUrl":null,"url":null,"abstract":"<p><p>Ga<sub>2</sub>O<sub>3</sub>-based metal-semiconductor-metal (MSM) solar-blind photodetectors, valued for their wide bandgap and stability, are among the most promising options. However, key metrics such as detectivity, wavelength selectivity, and response time were largely constrained by the intrinsic properties of Ga<sub>2</sub>O<sub>3</sub> and were difficult to enhance through optical design due to the fixed device structure. To address this, this study introduced a distributed Bragg reflector (DBR) structure in the UVC band between the sapphire substrate and Ga<sub>2</sub>O<sub>3</sub> epilayer, forming a Fabry-Pérot (FP) resonant cavity with the Ga<sub>2</sub>O<sub>3</sub>/air interface. The incorporation of the FP microcavity significantly enhanced the UVC photon density of states (<i>DOS</i>) within the Ga<sub>2</sub>O<sub>3</sub> thin film while suppressing that of other wavelength bands. As a result, the selectivity ratio was improved by 29.4 times (<i>R</i><sub>251<i>nm</i></sub>/<i>R</i><sub>360<i>nm</i></sub>=1.6×10<sup>4</sup>), and the device's detectivity as well as rise/fall times were also optimized. This work provided a novel, to the best of our knowledge, design strategy for high-performing solar-blind PDs.</p>","PeriodicalId":19540,"journal":{"name":"Optics letters","volume":"50 19","pages":"6097-6100"},"PeriodicalIF":3.3000,"publicationDate":"2025-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enhanced performance of Ga<sub>2</sub>O<sub>3</sub>-based MSM-PD by Fabry-Pérot microcavity.\",\"authors\":\"Taoan Wang, Xiyao He, Hao Xu, Ruoting Sun, Xiangyu Xu, Kelvin Hongliang Zhang, Hao Long\",\"doi\":\"10.1364/OL.573765\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Ga<sub>2</sub>O<sub>3</sub>-based metal-semiconductor-metal (MSM) solar-blind photodetectors, valued for their wide bandgap and stability, are among the most promising options. However, key metrics such as detectivity, wavelength selectivity, and response time were largely constrained by the intrinsic properties of Ga<sub>2</sub>O<sub>3</sub> and were difficult to enhance through optical design due to the fixed device structure. To address this, this study introduced a distributed Bragg reflector (DBR) structure in the UVC band between the sapphire substrate and Ga<sub>2</sub>O<sub>3</sub> epilayer, forming a Fabry-Pérot (FP) resonant cavity with the Ga<sub>2</sub>O<sub>3</sub>/air interface. The incorporation of the FP microcavity significantly enhanced the UVC photon density of states (<i>DOS</i>) within the Ga<sub>2</sub>O<sub>3</sub> thin film while suppressing that of other wavelength bands. As a result, the selectivity ratio was improved by 29.4 times (<i>R</i><sub>251<i>nm</i></sub>/<i>R</i><sub>360<i>nm</i></sub>=1.6×10<sup>4</sup>), and the device's detectivity as well as rise/fall times were also optimized. This work provided a novel, to the best of our knowledge, design strategy for high-performing solar-blind PDs.</p>\",\"PeriodicalId\":19540,\"journal\":{\"name\":\"Optics letters\",\"volume\":\"50 19\",\"pages\":\"6097-6100\"},\"PeriodicalIF\":3.3000,\"publicationDate\":\"2025-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics letters\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1364/OL.573765\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/OL.573765","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
Enhanced performance of Ga2O3-based MSM-PD by Fabry-Pérot microcavity.
Ga2O3-based metal-semiconductor-metal (MSM) solar-blind photodetectors, valued for their wide bandgap and stability, are among the most promising options. However, key metrics such as detectivity, wavelength selectivity, and response time were largely constrained by the intrinsic properties of Ga2O3 and were difficult to enhance through optical design due to the fixed device structure. To address this, this study introduced a distributed Bragg reflector (DBR) structure in the UVC band between the sapphire substrate and Ga2O3 epilayer, forming a Fabry-Pérot (FP) resonant cavity with the Ga2O3/air interface. The incorporation of the FP microcavity significantly enhanced the UVC photon density of states (DOS) within the Ga2O3 thin film while suppressing that of other wavelength bands. As a result, the selectivity ratio was improved by 29.4 times (R251nm/R360nm=1.6×104), and the device's detectivity as well as rise/fall times were also optimized. This work provided a novel, to the best of our knowledge, design strategy for high-performing solar-blind PDs.
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The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community.
Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.
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