{"title":"具有多种片上流控功能的带基微流控芯片的快速成型","authors":"Zekun Wu;Guangqun Ma;Allen Wang;Guangyin Zhang;Shuda Zhong;Kehao Zhao;Qirui Wang;Yuqi Li;Kevin P. Chen","doi":"10.1109/JMEMS.2025.3580421","DOIUrl":null,"url":null,"abstract":"This paper presents a rapid prototyping method for fabricating double-sided tape-based microfluidic chips that address limitations in material flexibility, fabrication complexity, and on-chip functionalities. The approach employs biocompatible, low-cost materials—including medical-grade tapes, rubber, and thermoplastics (PMMA, polycarbonate, polystyrene)—micromachined via femtosecond lasers. Solvent- and heat-free tape-based bonding enables efficient fabrication of optically transparent, UV-sterilizable layers for biomedical applications. The method supports integrated on-chip pumps and active/passive valves, achieving bidirectional and multidirectional flow control with minimal external actuation. These components operate at up to 14 psi actuation pressure and <inline-formula> <tex-math>$230~\\mu $ </tex-math></inline-formula>L/min flow rates, adaptable via chamber dimensions. A dual-pump configuration mimics peristaltic pumping for continuous flow, while a prototype with multidirectional pumps and reservoirs demonstrates dynamic fluid routing and on-demand distribution. The technique offers a versatile, scalable solution for microfluidic applications requiring sterility, optical clarity, and on-chip fluidic control. [2025-0059]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"594-602"},"PeriodicalIF":3.1000,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions\",\"authors\":\"Zekun Wu;Guangqun Ma;Allen Wang;Guangyin Zhang;Shuda Zhong;Kehao Zhao;Qirui Wang;Yuqi Li;Kevin P. Chen\",\"doi\":\"10.1109/JMEMS.2025.3580421\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a rapid prototyping method for fabricating double-sided tape-based microfluidic chips that address limitations in material flexibility, fabrication complexity, and on-chip functionalities. The approach employs biocompatible, low-cost materials—including medical-grade tapes, rubber, and thermoplastics (PMMA, polycarbonate, polystyrene)—micromachined via femtosecond lasers. Solvent- and heat-free tape-based bonding enables efficient fabrication of optically transparent, UV-sterilizable layers for biomedical applications. The method supports integrated on-chip pumps and active/passive valves, achieving bidirectional and multidirectional flow control with minimal external actuation. These components operate at up to 14 psi actuation pressure and <inline-formula> <tex-math>$230~\\\\mu $ </tex-math></inline-formula>L/min flow rates, adaptable via chamber dimensions. A dual-pump configuration mimics peristaltic pumping for continuous flow, while a prototype with multidirectional pumps and reservoirs demonstrates dynamic fluid routing and on-demand distribution. The technique offers a versatile, scalable solution for microfluidic applications requiring sterility, optical clarity, and on-chip fluidic control. [2025-0059]\",\"PeriodicalId\":16621,\"journal\":{\"name\":\"Journal of Microelectromechanical Systems\",\"volume\":\"34 5\",\"pages\":\"594-602\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2025-07-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Microelectromechanical Systems\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11071390/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11071390/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions
This paper presents a rapid prototyping method for fabricating double-sided tape-based microfluidic chips that address limitations in material flexibility, fabrication complexity, and on-chip functionalities. The approach employs biocompatible, low-cost materials—including medical-grade tapes, rubber, and thermoplastics (PMMA, polycarbonate, polystyrene)—micromachined via femtosecond lasers. Solvent- and heat-free tape-based bonding enables efficient fabrication of optically transparent, UV-sterilizable layers for biomedical applications. The method supports integrated on-chip pumps and active/passive valves, achieving bidirectional and multidirectional flow control with minimal external actuation. These components operate at up to 14 psi actuation pressure and $230~\mu $ L/min flow rates, adaptable via chamber dimensions. A dual-pump configuration mimics peristaltic pumping for continuous flow, while a prototype with multidirectional pumps and reservoirs demonstrates dynamic fluid routing and on-demand distribution. The technique offers a versatile, scalable solution for microfluidic applications requiring sterility, optical clarity, and on-chip fluidic control. [2025-0059]
期刊介绍:
The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.