On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror

In response to the critical need for low-voltage devices in advancing miniaturization technology, this study introduces a groundbreaking piezoelectric micro-electro-mechanical-systems (MEMS) scanning micromirror architecture employing a C-beam cantilever structure. This study employs lead zirconate titanate (PZT) thin films with excellent transverse piezoelectric coefficient (d₃₁) and dielectric constant and innovatively designs and fabricates three micromirror devices (reference design, T-beam design, and C-beam design) that maintain equivalent driving areas. This study demonstrates that the C-beam structure exhibits outstanding performance in driving voltage efficiency. Compared to the T-shaped beam design, under identical scanning angle conditions (30°), the driving voltage is reduced from 70 V_pp to 6 V_pp — a 91.42% reduction. Furthermore, after implementing a pre-polarization process (−30 V, 25 min), the C-beam micromirror achieves the optical scanning angle of 87.56° at 24 V_pp driving voltage. This significant improvement highlights the critical role of structural geometry and pre-polarization treatment in MEMS actuator performance. [2025-0061]